Difference between revisions of "Equipment List"

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'''NOTE: For EQUIPMENT TRAINING, contact the tool owner via Email for scheduling - DO NOT USE Labrunr - Training Sessions.'''
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== Lithography ==
 
== Lithography ==
 
===== Electron Beam Lithography =====
 
===== Electron Beam Lithography =====
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* [[Contact Mask Aligners: MA6 & MA6/BA6 | Contact Mask Aligners: Suss MicroTec models MA6 & MA6/BA6]]
 
* [[Contact Mask Aligners: MA6 & MA6/BA6 | Contact Mask Aligners: Suss MicroTec models MA6 & MA6/BA6]]
 
* [[Wafer Stepper | i-Line Wafer Stepper: GCA model 6300]]
 
* [[Wafer Stepper | i-Line Wafer Stepper: GCA model 6300]]
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* [[CNI-PV 2.1: Nano Imprint Lithography | Nano Imprint Lithography: NILT CNI-PV 2.1]]
 
* [[DWL-66: Direct-Write Laser System | Direct-Write Laser System: Heidelberg Instruments DWL-66]]
 
* [[DWL-66: Direct-Write Laser System | Direct-Write Laser System: Heidelberg Instruments DWL-66]]
 
* [[Nanoscribe PPGT: Microscale 3D Printer | Two-Photon Lithography (aka Microscale 3D Printing): Nanoscribe Photonic Professional GT]]
 
* [[Nanoscribe PPGT: Microscale 3D Printer | Two-Photon Lithography (aka Microscale 3D Printing): Nanoscribe Photonic Professional GT]]
 
* [[Optical Lithography Resources]]
 
* [[Optical Lithography Resources]]
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== Deposition ==
 
== Deposition ==
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== Microscopy ==
 
== Microscopy ==
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===== KNI Microscopy Policies =====
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* [https://caltech.box.com/s/mpsxkxmf5y8wjw9daijwbudeoqkkeudu KNI Microscopy Policies]
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===== Guide to Choosing KNI SEMs & FIBs =====
 
===== Guide to Choosing KNI SEMs & FIBs =====
 
*[[Guide to Choosing KNI SEMs & FIBs | Consult this guide for help in choosing the best SEMs and FIBs for your work]]
 
*[[Guide to Choosing KNI SEMs & FIBs | Consult this guide for help in choosing the best SEMs and FIBs for your work]]
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* [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe | SEM, Ga-FIB, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab]]
 
* [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe | SEM, Ga-FIB, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab]]
 
===== Scanning Electron Microscopes (SEMs) =====
 
===== Scanning Electron Microscopes (SEMs) =====
* [[Nova 200 NanoLab: SEM, EDS & WDS | SEM, EDS & WDS: Thermo Fisher Nova 200 NanoLab]]
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* [[Nova 200 NanoLab: SEM, EDS & WDS | SEM & EDS: Thermo Fisher Nova 200 NanoLab]]
 
* [[Sirion: SEM & EDS | SEM & EDS: Thermo Fisher Sirion]]
 
* [[Sirion: SEM & EDS | SEM & EDS: Thermo Fisher Sirion]]
 
* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | SEM, ESEM, Lithography & Probe Station: Thermo Fisher Quanta 200F]]
 
* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | SEM, ESEM, Lithography & Probe Station: Thermo Fisher Quanta 200F]]
 
* [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|SEM, Ga-FIB, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab]]
 
* [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|SEM, Ga-FIB, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab]]
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===== Transmission Electron Microscopes (TEMs) =====
 
===== Transmission Electron Microscopes (TEMs) =====
 
* [[Tecnai TF-30: 300 kV TEM, STEM, EDS & HAADF | TEM, STEM, EDS & HAADF: Thermo Fisher Tecnai TF-30 (50-300 kV)]]
 
* [[Tecnai TF-30: 300 kV TEM, STEM, EDS & HAADF | TEM, STEM, EDS & HAADF: Thermo Fisher Tecnai TF-30 (50-300 kV)]]
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== Wet Chemistry ==
 
== Wet Chemistry ==
* [[Wet Chemistry | Wet Chemistry Processes & Information]]
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===== Wet Chemistry Main page=====
* [[Safety Data Sheets (SDS) | Safety Data Sheets (SDS) for all approved materials in the KNI Lab]]
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* [[Wet Chemistry | Wet Chemistry page:]] - Facilities, Procedures & Safety, Chemical Lists
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===== Wet Chemistry Safety page=====
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* [[Wet Chemistry Safety | Wet Chemistry Safety page]] - Requesting new chemical, PPE Overview, Hazardous Waste Handling and Labeling, Decanting Chemicals, Hot Plate Rules, Buddy System, Secondary Containment and Other Best Practices.
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===== Wet Chemistry Resources page=====
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* [[Wet Chemistry Resources | Wet Chemistry Resources page]] - Contains fabrication recipes and procedures.
  
 
== Support Tools ==
 
== Support Tools ==
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===== Laboratory Data =====
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* [https://caltech.box.com/s/cl3ujgau2afl45joem7mg15e0oyxcgab General Laboratory Pass-down status information]
 
===== Thermal Processing =====
 
===== Thermal Processing =====
 
* [[Tube Furnaces for Wet & Dry Processing | Tube Furnaces: Tystar Tytan 1 & 2 (Wet & Dry Oxidation and Annealing)]]
 
* [[Tube Furnaces for Wet & Dry Processing | Tube Furnaces: Tystar Tytan 1 & 2 (Wet & Dry Oxidation and Annealing)]]

Revision as of 01:19, 12 October 2021

NOTE: For EQUIPMENT TRAINING, contact the tool owner via Email for scheduling - DO NOT USE Labrunr - Training Sessions.

Lithography

Electron Beam Lithography
Ion Beam Lithography
Optical Lithography


Deposition

Evaporation
Sputtering
Chemical Vapor Deposition (CVD)
Dielectric Packaging / Moisture Barrier

Etching

Dry Etching
Wet Etching

Microscopy

KNI Microscopy Policies
Guide to Choosing KNI SEMs & FIBs
Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)
Scanning Probe Microscopes
Optical Characterization
Sample Preparation for Microscopy

Wet Chemistry

Wet Chemistry Main page
Wet Chemistry Safety page
  • Wet Chemistry Safety page - Requesting new chemical, PPE Overview, Hazardous Waste Handling and Labeling, Decanting Chemicals, Hot Plate Rules, Buddy System, Secondary Containment and Other Best Practices.
Wet Chemistry Resources page

Support Tools

Laboratory Data
Thermal Processing
Substrate Processing
Device Processing
Metrology
Sample Preparation