Dektak 3ST: Profilometer

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Veeco Dektak 3ST Profilometer
Instrument Type Metrology
Techniques Surface Profiling
Staff Manager Alireza Ghaffari
Staff Email
Staff Phone 626-395-3984
Reserve time on FBS
Request training via FBS User Dashboard
Lab Location B235 Steele
Lab Phone 626-395-1539
Manufacturer Veeco
Model Dektak 3ST


The Dektak 3ST profilometer is a stylus-type surface profiler. It is equipped with a camera for locating the region of interest, manual sample manipulation & tilt correction, and profile analysis software. It can be used to get a rough idea of the topography of features by scanning a single line across the surface. Features as small as 100 nm in height can be determined with some approximation.

  • Surface Profiling



Related Instrumentation in the KNI

Scanning Probe Microscopes