Process Recipe Library

From the KNI Lab at Caltech
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You can browse the available recipes below, by lab area. You can also browse directly within the KNI's Box directory. Note that the vast majority of recipes are being made publicly available; only a select few are password-protected for members of the Caltech community:

  1. All Content (requires login with a email address)
  2. Publicly available content (no login required)

Lithography Process Recipes[edit]

Electron Beam Lithography[edit]
Helium Ion Beam Lithography[edit]
Neon Ion Beam Lithography[edit]
Optical Lithography[edit]

Deposition Process Recipes[edit]

Chemical Vapor Deposition (CVD)[edit]

Etching Process Recipes[edit]

Dry Etching[edit]
Wet Etching[edit]

Microscopy Process Recipes[edit]

Focused Ion Beam (FIB) Systems[edit]
Scanning Electron Microscopes (SEMs)[edit]
Transmission Electron Microscopes (TEMs)[edit]

Thermal Processing[edit]

Wet Oxidation[edit]

Multi-Technique Fabrication Processes[edit]