XeF2 Etcher for Silicon

XeF2 Silicon Etcher Instrument Type Etching Techniques Selective dry Si etching Staff Manager Alireza Ghaffari Staff Email alireza@caltech.edu Staff Phone 626-395-3984 Reserve time on LabRunr Request training by email Lab Location B235C Steele Lab Phone 626-395-1539 Manufacturer N/A Model N/A

Description

The XeF₂ etcher flows pressure- and time-controlled pulses of XeF₂ gas into a chamber to deliver an isotropic etch that is highly selective only to silicon. It is commonly used to remove Si under layers that are accessed through vias, in order to suspend membranes and other structures in MEMS devices.

Applications

• Very high selectivity dry Si etching
• MEMS fabrication

Resources

Equipment Status

• LabRunr Equipment Status (Select XeF2 from the dropdown menu)

SOPs

• KNI SOP