Light Microscope with Spectroscopic Reflectometer

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Light Microscope with Reflectometry
Olympus-BX51M-with-Filmetrics-F40.jpg
Instrument Type Optical Characterization
Techniques Optical Microscopy,
Spectroscopic Reflectometry
Staff Manager Bert Mendoza
Staff Email bertm@caltech.edu
Staff Phone 626-395-4075
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Lab Location B217 Steele
Lab Phone 626-395-1535
Manufacturer Olympus / Filmetrics
Model BX51M / F40

Description

This light microscope (Olympus BX51M) can be used to observe patterns and samples optically via 5x, 10x, 50x and 100x objective lenses. It also is equipped with a spectroscopic reflectometer (Filmetrics model F40) that can measure the thickness of transparent and translucent thin films. Spectroscopic reflectometry works by comparing the spectral amplitude and periodicity of light that is reflected at normal incidence from a thin film against the light that is reflected from a known reference sample; the results are fit to a mathematical model that takes into account estimated values for n (refractive index), k (absorption coefficient), and thickness.

Applications
  • Optical imaging
  • Thickness determinations

Resources

SOP
Manufacturer Manuals

Specifications

  • Objective Lenses: 5x, 10x, 50x, 100x
  • Optical Image Modes: Bright Field, Dark Field
  • Thickness Range: 20 nm to 40 μm
  • Wavelength Range: 400 to 850 nm