Tube Furnaces for Wet & Dry Processing

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Tystar Tytan Tube Furnaces 1 & 2
Tystar-Tytan-Tube-Furnaces.jpg
Instrument Type Support Tools,
Thermal Processing
Techniques Oxidation, Annealing
Staff Manager Kelly McKenzie
Staff Email kmmckenz@caltech.edu
Staff Phone 626-395-5732
Reserve time on LabRunr
Request training by email
Sign up for Tystar email list
Lab Location B235 Steele
Lab Phone 626-395-1532
Manufacturer Tystar Corporation
Model Tytan Horizontal
Diffusion Furnace

Description

The system is designed for processing up to one-hundred, 150 mm (6") wafers per tube. Tube 1 is designated for wet & dry oxidation using a flask evaporator. Tube 2 is designated for dry oxidation and annealing.

Applications
  • Dry & Wet oxidation
  • Annealing

Resources

Equipment Data
Tystar Oxidation Recipe
SOPs & Troubleshooting