Parylene Coater

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Parylene Coater
LabTop-3000-Parylene-Coater.jpg
Instrument Type Deposition
Techniques Parylene Deposition
Staff Manager Alex Wertheim
Staff Email alexw@caltech.edu
Staff Phone 626-395-3371
Reserve time on LabRunr
Request training by email
Sign up for Parylene email list
Lab Location B203 Steele
Lab Phone 626-395-1539
Manufacturer Para Tech
Model LabTop 3000

Description

The ParaTech LabTop 3000 Parylene coater uses a multi-stage thermal process to deposit a conformal parylene film on your substrates. Multiple wafers up to 150 mm diameter may be coated at once. Samples are under vacuum during and not subject to heat during coating.

Applications
  • Bio-compatible/moisture protection packaging
  • Dielectric polymer coating

Resources

SOPs