Nathan S. Lee

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Nathan S. Lee
Nathan-S-Lee.jpg
Title Plasma Process Engineer
Responsibilities Reactive Ion Etching,
Plasma-Enhanced CVD
Email nathslee@caltech.edu
Phone 626-395-1319 (office)
Office 319 Steele

About[edit]

Role in the KNI[edit]

Nathan Lee is the Plasma Process Engineer for The Kavli Nanoscience Institute (KNI) at the California Institute of Technology. He oversees the daily operation of the plasma processing tools in the KNI, maintains good working order, and provides trainings on the tools for the KNI users.
After working in the semiconductor equipment industry as a hardware and process engineer for 15 years, Nathan joined Caltech in January of 2016 as a plasma process engineer for the KNI. He brings to the KNI breadth of experience in plasma process development and hardware optimization.

Education[edit]

Nathan received his B.S. in Structural Engineering from the University of California, San Diego.

List of Managed Instruments[edit]

Etching[edit]
Deposition[edit]
Support Tools[edit]