Equipment List

From the KNI Lab at Caltech
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NOTE: For EQUIPMENT TRAINING, contact the tool owner via Email for scheduling - DO NOT USE Labrunr - Training Sessions.


Electron Beam Lithography
Ion Beam Lithography
Optical Lithography


Chemical Vapor Deposition (CVD)
Dielectric Packaging / Moisture Barrier


Dry Etching
Wet Etching


KNI Microscopy Policies
Guide to Choosing KNI SEMs & FIBs
Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)
Scanning Probe Microscopes
Optical Characterization
Sample Preparation for Microscopy

Order Your Own Stubs
  • Stubs used for mounting specimens are considered a personal, consumable item in the KNI. There are some old stubs at each Microscope. You can buy your own stubs so that you can keep them clean and available to you. There are many stub geometries and configurations. If you chose to buy your own stubs, please show them to the staff microscopist prior to using them: some stubs including stubs with copper clips have large height differences and can only be used safely in specific operating conditions.

Wet Chemistry

Wet Chemistry Main page
Wet Chemistry Safety page
  • Wet Chemistry Safety page - Requesting new chemical, PPE Overview, Hazardous Waste Handling and Labeling, Decanting Chemicals, Hot Plate Rules, Buddy System, Secondary Containment and Other Best Practices.
Wet Chemistry Resources page

Support Tools

Laboratory Data
Thermal Processing
Substrate Processing
Device Processing
Sample Preparation