Equipment List

From the KNI Lab at Caltech
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NOTE: For EQUIPMENT TRAINING, contact the tool owner via Email for scheduling - DO NOT USE Labrunr - Training Sessions.


Electron Beam Lithography
Ion Beam Lithography
Optical Lithography


Chemical Vapor Deposition (CVD)
Dielectric Packaging / Moisture Barrier


Dry Etching
Wet Etching


Guide to Choosing KNI SEMs & FIBs
Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)
Scanning Probe Microscopes
Optical Characterization
Sample Preparation for Microscopy

Wet Chemistry

Wet Chemistry Main page
Wet Chemistry Safety page
  • Wet Chemistry Safety page - Requesting new chemical, PPE Overview, Hazardous Waste Handling and Labeling, Decanting Chemicals, Hot Plate Rules, Buddy System, Secondary Containment and Other Best Practices.
Wet Chemistry Resources page

Support Tools

Laboratory Data
Thermal Processing
Substrate Processing
Device Processing
Sample Preparation