Equipment List

From the KNI Lab at Caltech
Jump to navigation Jump to search

NOTE: For EQUIPMENT TRAINING, contact the tool owner via Email for scheduling - DO NOT USE Labrunr - Training Sessions.

Lithography[edit]

Electron Beam Lithography[edit]
Ion Beam Lithography[edit]
Optical Lithography[edit]


Deposition[edit]

Evaporation[edit]
Sputtering[edit]
Chemical Vapor Deposition (CVD)[edit]
Dielectric Packaging / Moisture Barrier[edit]

Etching[edit]

Dry Etching[edit]
Wet Etching[edit]

Microscopy[edit]

Guide to Choosing KNI SEMs & FIBs[edit]
Focused Ion Beam (FIB) Systems[edit]
Scanning Electron Microscopes (SEMs)[edit]
Transmission Electron Microscopes (TEMs)[edit]
Scanning Probe Microscopes[edit]
Optical Characterization[edit]
Sample Preparation for Microscopy[edit]

Wet Chemistry[edit]

Support Tools[edit]

Laboratory Data[edit]
Thermal Processing[edit]
Substrate Processing[edit]
Device Processing[edit]
Metrology[edit]
Sample Preparation[edit]