Equipment List: Difference between revisions
Jump to navigation
Jump to search
| (5 intermediate revisions by 3 users not shown) | |||
| Line 56: | Line 56: | ||
* [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe | SEM, Ga-FIB, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab]] | * [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe | SEM, Ga-FIB, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab]] | ||
===== Scanning Electron Microscopes (SEMs) ===== | ===== Scanning Electron Microscopes (SEMs) ===== | ||
* [[Nova 200 NanoLab: SEM | * [[Nova 200 NanoLab: SEM & EDS | Nova 200 NanoLab: SEM & EDS]] | ||
* [[Sirion: SEM & EDS | SEM & EDS | * [[Sirion: SEM & EDS | Sirion: SEM & EDS]] | ||
* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | SEM, ESEM, Lithography & Probe Station: Thermo Fisher Quanta 200F]] | * [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | SEM, ESEM, Lithography & Probe Station: Thermo Fisher Quanta 200F]] | ||
* [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|SEM, Ga-FIB, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab]] | * [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|SEM, Ga-FIB, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab]] | ||
| Line 85: | Line 85: | ||
== Wet Chemistry == | == Wet Chemistry == | ||
===== Wet Chemistry Main page===== | ===== Wet Chemistry Main page===== | ||
* [[Wet Chemistry | Wet Chemistry page:]] - Facilities | * [[Wet Chemistry | Wet Chemistry page:]] | ||
- Facilities Procedures & Safety | |||
- Chemicals Supplied by KNI | |||
- Chemicals Approved for use in KNI cleanroom- Safety Data Sheet (SDS) Lists | |||
- Requesting New Chemicals for use in the KNI cleanroom | |||
===== Wet Chemistry Safety page===== | ===== Wet Chemistry Safety page===== | ||
* [[Wet Chemistry Safety | Wet Chemistry Safety page]] - | * [[Wet Chemistry Safety | Wet Chemistry Safety page]] | ||
- PPE Overview | |||
-Hazardous Waste Handling and Labeling | |||
-Decanting Chemicals | |||
-Hot Plate Rules | |||
-KNI Buddy System | |||
-Secondary Containment and Other Best Practices. | |||
===== Wet Chemistry Resources page===== | ===== Wet Chemistry Resources page===== | ||
* [[Wet Chemistry Resources | Wet Chemistry Resources page]] - Contains fabrication recipes and procedures. | * [[Wet Chemistry Resources | Wet Chemistry Resources page]] | ||
- Contains fabrication recipes and procedures. | |||
== Support Tools == | == Support Tools == | ||
===== | ===== Equipment Status ===== | ||
===== Thermal Processing ===== | ===== Thermal Processing ===== | ||
* [[Tube Furnaces for Wet & Dry Processing | Tube Furnaces: Tystar Tytan 1 & 2 (Wet & Dry Oxidation and Annealing)]] | * [[Tube Furnaces for Wet & Dry Processing | Tube Furnaces: Tystar Tytan 1 & 2 (Wet & Dry Oxidation and Annealing)]] | ||
Revision as of 21:45, 6 July 2022
NOTE: For EQUIPMENT TRAINING, contact the tool owner via Email for scheduling - DO NOT USE Labrunr - Training Sessions.
Lithography
Electron Beam Lithography
- Electron Beam Pattern Generator: Raith EBPG 5200 (100 kV)
- Electron Beam Pattern Generator: Raith EBPG 5000+ (100 kV)
- Nanometer Pattern Generation System: Thermo Fisher Quanta 200F SEM with NPGS (1-30 kV)
Ion Beam Lithography
Optical Lithography
- Contact Mask Aligners: Suss MicroTec models MA6 & MA6/BA6
- i-Line Wafer Stepper: GCA model 6300
- Nano Imprint Lithography: NILT CNI-PV 2.1
- Direct-Write Laser System: Heidelberg Instruments DWL-66
- Two-Photon Lithography (aka Microscale 3D Printing): Nanoscribe Photonic Professional GT
- Optical Lithography Resources
Deposition
Evaporation
- Metals (Al, Au, Pt & Ti): Kurt J Lesker Labline Electron Beam Evaporator
- Metals & Oxides: CHA Industries Mark 40 Electron Beam Evaporator
- Carbon: Leica EM ACE600 Carbon Evaporator
Sputtering
- Dielectric Sputter System: AJA International ATC Orion 8
- Chalcogenide Sputter System: AJA International ATC Orion 8
Chemical Vapor Deposition (CVD)
- Atomic Layer Deposition (ALD): Oxford Instruments FlexAL II
- Plasma-Enhanced Chemical Vapor Deposition (PECVD): Oxford Instruments System 100
Dielectric Packaging / Moisture Barrier
Etching
Dry Etching
- Silicon Etcher: Oxford Instruments DRIE System 100 Bosch & Cryo ICP-RIE
- III-V Material, Metal & Silicon Etcher: Oxford Instruments System 100 ICP-RIE
- Dielectric Material Etcher: Oxford Instruments Dielectric System 100 ICP-RIE
- Silicon, III-V Material & Organics Etcher: Plasma-Therm Dual Chamber RIE
- Oxygen & Argon Plasma Cleaner: PIE Scientific Tergeo Plus ICP- & CCP-RIE
- XeF2 Etcher for Silicon
Wet Etching
Microscopy
KNI Microscopy Policies
Guide to Choosing KNI SEMs & FIBs
Focused Ion Beam (FIB) Systems
- Helium, Neon & Gallium FIB: Zeiss ORION NanoFab
- SEM, Ga-FIB, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab
Scanning Electron Microscopes (SEMs)
- Nova 200 NanoLab: SEM & EDS
- Sirion: SEM & EDS
- SEM, ESEM, Lithography & Probe Station: Thermo Fisher Quanta 200F
- SEM, Ga-FIB, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab
Transmission Electron Microscope (TEM)
Scanning Probe Microscopes
Optical Characterization
- Spectroscopic Ellipsometer: Woolam M-2000
- Light Microscope: Olympus BX51M with Filmetrics Spectroscopic Reflectometer
- Fluorescence Microscope: Olympus IX81
Sample Preparation for Microscopy
- Carbon Evaporator (Leica EM ACE600) to make samples conductive
- Oxygen & Argon Plasma Cleaner (Tergeo Plus ICP- & CCP-RIE) to remove hydrocarbons from surface
- TEM Sample Preparation Equipment: Polishing Stations, 3 mm Disk Cutter, Dimpler, Argon Ion Mill
Stubs for specimen mounting
- Stubs used for mounting specimens are considered a personal, consumable item in the KNI. There are some stubs at each Microscope which can be used by any KNI microscopy user. You can also buy your own stubs so that you can keep them clean and available to you. There are many stub geometries and configurations. If you chose to buy your own stubs, please show them to the staff microscopist prior to using them: some stubs including stubs with copper clips have large height differences and can only be used safely in specific operating conditions.
Wet Chemistry
Wet Chemistry Main page
- Facilities Procedures & Safety
- Chemicals Supplied by KNI
- Chemicals Approved for use in KNI cleanroom- Safety Data Sheet (SDS) Lists
- Requesting New Chemicals for use in the KNI cleanroom
Wet Chemistry Safety page
- PPE Overview
-Hazardous Waste Handling and Labeling
-Decanting Chemicals
-Hot Plate Rules
-KNI Buddy System
-Secondary Containment and Other Best Practices.
Wet Chemistry Resources page
- Contains fabrication recipes and procedures.
Support Tools
Equipment Status
Thermal Processing
Substrate Processing
- Scriber-Breaker: Dynatex GST-150
- Wafer Bonder: Suss MicroTec model SB6L
- Critical Point Dryer: Tousimis Automegasamdri 915B
Device Processing
Metrology
- Spectroscopic Ellipsometer: Woolam M-2000
- Profilometer: Veeco Dektak 3ST
- Light Microscope: Olympus BX51M with Filmetrics Spectroscopic Reflectometer
- Electrical Probing Station: Cascade Microtech M150