Equipment List

From the KNI Lab at Caltech
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NOTE: For EQUIPMENT TRAINING, contact the tool owner via Email for scheduling - DO NOT USE Labrunr - Training Sessions.

Lithography

Electron Beam Lithography
Ion Beam Lithography
Optical Lithography


Deposition

Evaporation
Sputtering
Chemical Vapor Deposition (CVD)
Dielectric Packaging / Moisture Barrier

Etching

Dry Etching
Wet Etching

Microscopy

KNI Microscopy Policies
Guide to Choosing KNI SEMs & FIBs
Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscope (TEM)
Scanning Probe Microscopes
Optical Characterization
Sample Preparation for Microscopy
Stubs for specimen mounting
  • Stubs used for mounting specimens are considered a personal, consumable item in the KNI. There are some stubs at each Microscope which can be used by any KNI microscopy user. You can also buy your own stubs so that you can keep them clean and available to you. There are many stub geometries and configurations. If you chose to buy your own stubs, please show them to the staff microscopist prior to using them: some stubs including stubs with copper clips have large height differences and can only be used safely in specific operating conditions.

Wet Chemistry

Wet Chemistry Main page

- Facilities Procedures & Safety

- Chemicals Supplied by KNI

- Chemicals Approved for use in KNI cleanroom- Safety Data Sheet (SDS) Lists

- Requesting New Chemicals for use in the KNI cleanroom

Wet Chemistry Safety page

- PPE Overview

-Hazardous Waste Handling and Labeling

-Decanting Chemicals

-Hot Plate Rules

-KNI Buddy System

-Secondary Containment and Other Best Practices.

Wet Chemistry Resources page

- Contains fabrication recipes and procedures.

Support Tools

Laboratory Data
Thermal Processing
Substrate Processing
Device Processing
Metrology
Sample Preparation