Usage Rates: Difference between revisions
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!scope="col" style="text-align:center; width: 16%" | Corporate Rate** | !scope="col" style="text-align:center; width: 16%" | Corporate Rate** | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = EBPG 5000+ | |EquipmentName = [[EBPG 5000+: 100 kV Electron Beam Lithography | EBPG 5000+]] | ||
|EquipmentCategory = Lithography | |EquipmentCategory = Lithography | ||
|CaltechRate = 62.00 | |CaltechRate = 62.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = EBPG 5200 | |EquipmentName = [[EBPG 5200: 100 kV Electron Beam Lithography | EBPG 5200]] | ||
|EquipmentCategory = Lithography | |EquipmentCategory = Lithography | ||
|CaltechRate = 62.00 | |CaltechRate = 62.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Contact Mask Aligners | |EquipmentName = [[Contact Mask Aligners: MA6 & MA6/BA6 | Contact Mask Aligners]] | ||
|EquipmentCategory = Lithography | |EquipmentCategory = Lithography | ||
|CaltechRate = 36.00 | |CaltechRate = 36.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Direct-Write Laser System (DWL-66) | |EquipmentName = [[DWL-66: Direct-Write Laser System | Direct-Write Laser System (DWL-66)]] | ||
|EquipmentCategory = Lithography | |EquipmentCategory = Lithography | ||
|CaltechRate = 47.00 | |CaltechRate = 47.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = | |EquipmentName = [[Nanoscribe PPGT: Microscale 3D Printer | Nanoscribe (Microscale 3D Printer)]] | ||
|EquipmentCategory = Lithography | |EquipmentCategory = Lithography | ||
|CaltechRate = 8.00 | |CaltechRate = 8.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Evaporator: Metals & Oxides ( | |EquipmentName = [[CHA: Electron Beam Evaporator | Evaporator: Metals & Oxides (CHA)]] | ||
|EquipmentCategory = Deposition | |EquipmentCategory = Deposition | ||
|CaltechRate = 24.00 | |CaltechRate = 24.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Evaporator: Al, Au, Pt & Ti (Labline) | |EquipmentName = [[Labline: Electron Beam Evaporator | Evaporator: Al, Au, Pt & Ti (Labline)]] | ||
|EquipmentCategory = Deposition | |EquipmentCategory = Deposition | ||
|CaltechRate = 24.00 | |CaltechRate = 24.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Sputter: Chalcogenide Material | |EquipmentName = [[ATC Orion 8: Chalcogenide Sputter System | Sputter: Chalcogenide Material]] | ||
|EquipmentCategory = Deposition | |EquipmentCategory = Deposition | ||
|CaltechRate = 70.00 | |CaltechRate = 70.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Sputter: Dielectric Material | |EquipmentName = [[ATC Orion 8: Dielectric Sputter System | Sputter: Dielectric Material]] | ||
|EquipmentCategory = Deposition | |EquipmentCategory = Deposition | ||
|CaltechRate = 37.00 | |CaltechRate = 37.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Atomic Layer Deposition | |EquipmentName = [[FlexAL II: Atomic Layer Deposition (ALD) | Atomic Layer Deposition (ALD)]] | ||
|EquipmentCategory = Deposition | |EquipmentCategory = Deposition | ||
|CaltechRate = 67.00 | |CaltechRate = 67.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = PECVD | |EquipmentName = [[Plasma-Enhanced Chemical Vapor Deposition (PECVD) | PECVD]] | ||
|EquipmentCategory = Deposition | |EquipmentCategory = Deposition | ||
|CaltechRate = 67.00 | |CaltechRate = 67.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Silicon Etcher (DRIE) | |EquipmentName = [[DRIE: Bosch & Cryo ICP-RIE for Silicon | Silicon Etcher (DRIE)]] | ||
|EquipmentCategory = Etching | |EquipmentCategory = Etching | ||
|CaltechRate = 50.00 | |CaltechRate = 50.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Silicon | |EquipmentName = [[ICP-RIE: III-V, Metal & Silicon Etcher| III-V, Metal & Silicon Etcher]] | ||
|EquipmentCategory = Etching | |EquipmentCategory = Etching | ||
|CaltechRate = 50.00 | |CaltechRate = 50.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = | |EquipmentName = [[Dual Chamber RIE: Silicon, III-V Material & Organics Etcher | Silicon, III-V & Organics Etcher]] | ||
|EquipmentCategory = Etching | |EquipmentCategory = Etching | ||
|CaltechRate = 50.00 | |CaltechRate = 50.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = | |EquipmentName = [[ICP-RIE: Dielectric Etcher | Dielectric Etcher]] | ||
|EquipmentCategory = Etching | |EquipmentCategory = Etching | ||
|CaltechRate = 50.00 | |CaltechRate = 50.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = XeF<sub>2</sub> Etcher for Silicon | |EquipmentName = [[XeF2 Etcher for Silicon | XeF<sub>2</sub> Etcher for Silicon]] | ||
|EquipmentCategory = Etching | |EquipmentCategory = Etching | ||
|CaltechRate = 50.00 | |CaltechRate = 50.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = ORION NanoFab He/Ne/Ga-FIB | |EquipmentName = [[ORION NanoFab: Helium, Neon & Gallium FIB | ORION NanoFab He/Ne/Ga-FIB]] | ||
|EquipmentCategory = Microscopy, Lithography | |EquipmentCategory = Microscopy, Lithography | ||
|CaltechRate = 65.00 | |CaltechRate = 65.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Nova 600 SEM/Ga-FIB | |EquipmentName = [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe | Nova 600 SEM/Ga-FIB]] | ||
|EquipmentCategory = Microscopy | |EquipmentCategory = Microscopy | ||
|CaltechRate = 65.00 | |CaltechRate = 65.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Nova 200 SEM/EDS/WDS | |EquipmentName = [[Nova 200 NanoLab: SEM, EDS & WDS | Nova 200 SEM/EDS/WDS]] | ||
|EquipmentCategory = Microscopy | |EquipmentCategory = Microscopy | ||
|CaltechRate = 65.00 | |CaltechRate = 65.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Sirion SEM/EDS | |EquipmentName = [[Sirion: SEM & EDS | Sirion SEM/EDS]] | ||
|EquipmentCategory = Microscopy | |EquipmentCategory = Microscopy | ||
|CaltechRate = 39.00 | |CaltechRate = 39.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Quanta SEM/NPGS | |EquipmentName = [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | Quanta SEM/NPGS]] | ||
|EquipmentCategory = Microscopy, Lithography | |EquipmentCategory = Microscopy, Lithography | ||
|CaltechRate = 39.00 | |CaltechRate = 39.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Tecnai TF-30 TEM/STEM | |EquipmentName = [[Tecnai TF-30: 300 kV TEM, STEM, EDS & HAADF | Tecnai TF-30 TEM/STEM]] | ||
|EquipmentCategory = Microscopy | |EquipmentCategory = Microscopy | ||
|CaltechRate = 97.00 | |CaltechRate = 97.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Atomic Force Microscope (AFM) | |EquipmentName = [[Dimension Icon: Atomic Force Microscope (AFM) | Atomic Force Microscope (AFM)]] | ||
|EquipmentCategory = Microscopy | |EquipmentCategory = Microscopy | ||
|CaltechRate = 41.00 | |CaltechRate = 41.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Critical Point Dryer | |EquipmentName = [[Critical Point Dryer]] | ||
|EquipmentCategory = Support Tools | |EquipmentCategory = Support Tools | ||
|CaltechRate = 54.00 | |CaltechRate = 54.00 | ||
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}} | }} | ||
{{UsageRateTableItem| | {{UsageRateTableItem| | ||
|EquipmentName = Tube Furnaces | |EquipmentName = [[Tube Furnaces for Wet & Dry Processing | Tube Furnaces]] | ||
|EquipmentCategory = Support Tools | |EquipmentCategory = Support Tools | ||
|CaltechRate = 5.00 | |CaltechRate = 5.00 | ||
Revision as of 23:08, 27 May 2019
The rates below are valid beginning October 2018 and are subject to change.
NOTE:
- Rates for JPL, Non-Caltech Academic, Government, and Corporate KNI lab members are inclusive of FY19 Caltech F&A (i.e. "overhead") fees.
- Individual Tools listed below are charged by the hour or portion thereof.
- Precious Metal Usage (e.g. Au, Pt, etc.) is billed by the gram or portion thereof. The market prices are passed on to users and do not include Caltech overhead.
Equipment Rates
| Name | Category | Caltech Rate | JPL/Non-Caltech Acad/Govt Rate | Corporate Rate** |
|---|---|---|---|---|
| EBPG 5000+ |
Lithography |
$62.00 |
$101.99 |
$152.99 |
| EBPG 5200 |
Lithography |
$62.00 |
$101.99 |
$152.99 |
| Contact Mask Aligners |
Lithography |
$36.00 |
$59.22 |
$88.83 |
| Direct-Write Laser System (DWL-66) |
Lithography |
$47.00 |
$77.32 |
$115.97 |
| Nanoscribe (Microscale 3D Printer) |
Lithography |
$8.00 |
$13.16 |
$19.74 |
| Evaporator: Metals & Oxides (CHA) |
Deposition |
$24.00 |
$39.48 |
$59.22 |
| Evaporator: Al, Au, Pt & Ti (Labline) |
Deposition |
$24.00 |
$39.48 |
$59.22 |
| Sputter: Chalcogenide Material |
Deposition |
$70.00 |
$115.15 |
$172.73 |
| Sputter: Dielectric Material |
Deposition |
$37.00 |
$60.87 |
$91.30 |
| Atomic Layer Deposition (ALD) |
Deposition |
$67.00 |
$110.22 |
$165.32 |
| PECVD |
Deposition |
$67.00 |
$110.22 |
$165.32 |
| Silicon Etcher (DRIE) |
Etching |
$50.00 |
$82.25 |
$123.38 |
| III-V, Metal & Silicon Etcher |
Etching |
$50.00 |
$82.25 |
$123.38 |
| Silicon, III-V & Organics Etcher |
Etching |
$50.00 |
$82.25 |
$123.38 |
| Dielectric Etcher |
Etching |
$50.00 |
$82.25 |
$123.38 |
| XeF2 Etcher for Silicon |
Etching |
$50.00 |
$82.25 |
$123.38 |
| ORION NanoFab He/Ne/Ga-FIB |
Microscopy, Lithography |
$65.00 |
$106.93 |
$160.39 |
| Nova 600 SEM/Ga-FIB |
Microscopy |
$65.00 |
$106.93 |
$160.39 |
| Nova 200 SEM/EDS/WDS |
Microscopy |
$65.00 |
$106.93 |
$160.39 |
| Sirion SEM/EDS |
Microscopy |
$39.00 |
$64.16 |
$96.23 |
| Quanta SEM/NPGS |
Microscopy, Lithography |
$39.00 |
$64.16 |
$96.23 |
| Tecnai TF-30 TEM/STEM |
Microscopy |
$97.00 |
$159.57 |
$239.35 |
| Atomic Force Microscope (AFM) |
Microscopy |
$41.00 |
$67.45 |
$101.17 |
| Critical Point Dryer |
Support Tools |
$54.00 |
$88.83 |
$133.25 |
| Tube Furnaces |
Support Tools |
$5.00 |
$8.23 |
$12.34 |
| Monthly Base Rate* |
General Equipment* |
$655.00* |
$1,077.48* |
$1,616.21* |
*Monthly Base Rate
The Monthly Base Rate is a flat fee charged per user, per month. It includes the use of:
Profilometers, Chemical Wet Benches, GST-150 Scriber-Breaker, M-2000 Spectroscopic Ellipsometer, Tecnai TF-20 TEM, GCA 6300 Stepper, Rapid Thermal Processor, Parylene Coater, SB6L Wafer Bonder, Wire Bonder, additional optical microscopes, related metrology, miscellaneous support tools and general supplies (e.g. gowning, chemicals, equipment reservation software, etc.).
**Corporate Memberships
For full information on the KNI's corporate membership plan, please send an email to tkimoto@caltech.edu with details regarding the number of people looking to join as KNI lab members, equipment needs, anticipated start date, and information about the company. Startup companies may qualify for limited-term reduced rates.