Usage Rates

The rates below are valid beginning October 2018 and are subject to change.

NOTE:

• Charges are incurred on a pay-as-you-go basis.
• Rates for JPL, Non-Caltech Academic, Government, and Corporate KNI lab members are inclusive of FY19 Caltech F&A fees ("overhead"/IDC).
• Individual Tools listed below are charged by the hour or portion thereof.
• Precious Metal Usage (e.g. Au, Pt, etc.) is billed by the gram or portion thereof. Market prices are passed on to users and do not include Caltech F&A fees.
• Lab Members who use the TF-30 STEM only are exempt from the Monthly Base Fee.

Equipment Rates

Name	Category	Caltech Rate	JPL/Non-Caltech Acad/Govt Rate	Corporate Rate**
EBPG 5000+	Lithography	$62.00	$101.99	$152.99
EBPG 5200	Lithography	$62.00	$101.99	$152.99
Contact Mask Aligners	Lithography	$36.00	$59.22	$88.83
Direct-Write Laser System (DWL-66)	Lithography	$47.00	$77.32	$115.97
Nanoscribe (Microscale 3D Printer)	Lithography	$8.00	$13.16	$19.74
Evaporator: Metals & Oxides (CHA)	Deposition	$24.00	$39.48	$59.22
Evaporator: Al, Au, Pt & Ti (Labline)	Deposition	$24.00	$39.48	$59.22
Sputter: Chalcogenide Material	Deposition	$70.00	$115.15	$172.73
Sputter: Dielectric Material	Deposition	$37.00	$60.87	$91.30
Atomic Layer Deposition (ALD)	Deposition	$67.00	$110.22	$165.32
PECVD	Deposition	$67.00	$110.22	$165.32
Silicon Etcher (DRIE)	Etching	$50.00	$82.25	$123.38
III-V, Metal & Silicon Etcher	Etching	$50.00	$82.25	$123.38
Silicon, III-V & Organics Etcher	Etching	$50.00	$82.25	$123.38
Dielectric Etcher	Etching	$50.00	$82.25	$123.38
XeF2 Etcher for Silicon	Etching	$50.00	$82.25	$123.38
ORION NanoFab He/Ne/Ga-FIB	Microscopy, Lithography	$65.00	$106.93	$160.39
Nova 600 SEM/Ga-FIB	Microscopy	$65.00	$106.93	$160.39
Nova 200 SEM/EDS/WDS	Microscopy	$65.00	$106.93	$160.39
Sirion SEM/EDS	Microscopy	$39.00	$64.16	$96.23
Quanta SEM/NPGS	Microscopy, Lithography	$39.00	$64.16	$96.23
Tecnai TF-30 TEM/STEM	Microscopy	$97.00	$159.57	$239.35
Atomic Force Microscope (AFM)	Microscopy	$41.00	$67.45	$101.17
Critical Point Dryer	Support Tools	$54.00	$88.83	$133.25
Tube Furnaces	Support Tools	$5.00	$8.23	$12.34
Monthly Base Rate*	General Equipment*	$655.00*	$1,077.48*	$1,616.21*

*Monthly Base Rate

The Monthly Base Rate is a flat fee charged per user, per month. It includes the use of:

Chemical Wet Benches, Tecnai TF-20 TEM, GCA 6300 Wafer Stepper, Scriber-Breaker, Spectroscopic Ellipsometer, Carbon Evaporator, O₂/Ar Plasma Cleaner, Parylene Coater, Wafer Bonder, Wire Bonder, Electrical Probe Station, Rapid Thermal Processor, Profilometer, additional optical microscopes, related metrology, miscellaneous support tools and general supplies (e.g. gowning, chemicals, equipment reservation software, etc).

**Corporate Memberships

For full information on the KNI's corporate membership plan, please send an email to tkimoto@caltech.edu with details regarding the number of people looking to join as KNI lab members, equipment needs, anticipated start date, and information about the company. Startup companies may qualify for limited-term reduced rates.