Difference between revisions of "Equipment List"

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== Support Tools ==
 
== Support Tools ==
 +
===== Thermal Processing =====
 +
* [[Tube Furnaces for Wet & Dry Processing | Tube Furnaces: Tystar Tytan 1 & 2 (Wet & Dry Oxidation and Annealing)]]
 +
* [[Rapid Thermal Processor | Rapid Thermal Processing: Modular Process Technology RTP-600S]]
 +
* [[Rapid Thermal Annealer | Rapid Thermal Annealer: Jipelec Jetfirst 150]]
 +
===== Substrate Processing =====
 +
* [[Scriber-Breaker | Scriber-Breaker: Dynatex GST-150]]
 +
* [[Wafer Bonder | Wafer Bonder: Suss MicroTec model SB6L]]
 +
* [[Critical Point Dryer | Critical Point Dryer: Tousimis Automegasamdri 915B]]
 +
===== Device Processing =====
 +
* [[Wedge-Wedge Wire Bonder | Wedge-Wedge Wire Bonder: Westbond model 7476D-79]]
 +
* [[Electrical Probing Station | Electrical Probing Station: Cascade Microtech M150]]
 +
===== Sample Preparation =====
 +
* [[TEM Sample Preparation Equipment | TEM Sample Preparation Equipment: Polishing Stations, 3 mm Disk Cutter, Dimpler, Argon Ion Mill]]
 +
* [[Carbon Evaporator | Carbon Evaporator (Leica EM ACE600) to make samples conductive]]
 +
* [[Tergeo Plus ICP- & CCP-RIE: Oxygen & Argon Plasma Cleaner | Oxygen & Argon Plasma Cleaner (Tergeo Plus ICP- & CCP-RIE) to remove hydrocarbons from surface]]
 +
 +
== Old Support Tools ==
 
===== Thermal Processing =====
 
===== Thermal Processing =====
 
* [[Tytan 1 & 2: Tube Furnaces for Wet & Dry Processing | Tube Furnaces: Tystar Tytan 1 & 2 (Wet & Dry Oxidation and Annealing)]]
 
* [[Tytan 1 & 2: Tube Furnaces for Wet & Dry Processing | Tube Furnaces: Tystar Tytan 1 & 2 (Wet & Dry Oxidation and Annealing)]]
 
* [[RTP-600S: Rapid Thermal Processor | Rapid Thermal Processing: Modular Process Technology RTP-600S]]
 
* [[RTP-600S: Rapid Thermal Processor | Rapid Thermal Processing: Modular Process Technology RTP-600S]]
 
* [[Jetfirst 150: Rapid Thermal Annealer | Rapid Thermal Annealer: Jipelec Jetfirst 150]]
 
* [[Jetfirst 150: Rapid Thermal Annealer | Rapid Thermal Annealer: Jipelec Jetfirst 150]]
 
 
===== Substrate Processing =====
 
===== Substrate Processing =====
 
* [[Dynatex GST-150: Scriber-Breaker | Scriber-Breaker: Dynatex GST-150]]
 
* [[Dynatex GST-150: Scriber-Breaker | Scriber-Breaker: Dynatex GST-150]]

Revision as of 22:09, 10 May 2019

Lithography

Electron Beam Lithography
Ion Beam Lithography
Optical Lithography

Deposition

Evaporation
Sputtering
Chemical Vapor Deposition (CVD)
Dielectric Packaging / Moisture Barrier

Etching

Dry Etching
Wet Etching

Microscopy

Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)
Scanning Probe Microscopes
Optical Characterization
Sample Preparation for Microscopy

Support Tools

Thermal Processing
Substrate Processing
Device Processing
Sample Preparation

Old Support Tools

Thermal Processing
Substrate Processing
Device Processing
Sample Preparation