Evan Piano

Evan Piano Title Nanofabrication Process Engineer Responsibilities Process Development, Microscopy Email empiano@caltech.edu Phone 626-395-5732 (office) Office 330 Steele

About

Role in the KNI

Evan is the Nanofabrication Process Engineer for The Kavli Nanoscience Institute (KNI) at the California Institute of Technology.

Education

Evan is a fourth year undergraduate student at the University of Waterloo.

List of Managed Instruments

Deposition

• Metals (Al, Au, Pt & Ti): Kurt J Lesker Labline Electron Beam Evaporator
• Metals & Oxides: CHA Industries Mark 40 Electron Beam Evaporator
• Dielectric Sputter System: AJA International ATC Orion 8
• Chalcogenide Sputter System: AJA International ATC Orion 8
• Parylene Coater: Para Tech LabTop 3000

Etching

• XeF₂ Etcher for Silicon

Lithography

• Two-Photon Lithography (aka Microscale 3D Printing): Nanoscribe Photonic Professional GT

Support Tools

• Wafer Bonder: Suss MicroTec model SB6L
• Rapid Thermal Processing: Modular Process Technology RTP-600S