Kelly McKenzie

Kelly McKenzie Title Plasma Process Engineer Responsibilities Etch and Deposition Email kmmckenz@caltech.edu Phone 626-395-5732 (office) Office 130 Steele

About

Role in the KNI

Kelly (they/them) is the Plasma Process Engineer for the Kavli Nanoscience Institute (KNI) at the California Institute of Technology. Kelly manages the KNI's suite of plasma etch and chemical vapor deposition systems, as well as the tools for wet and dry oxidation and annealing. In their roll, Kelly maintains equipment, trains researchers in equipment operation, and provides technical support for helping users carry out their projects' objectives.

Kelly joined Caltech in 2017 as a graduate student in the Atwater research group in the Applied Physics & Materials Science department where they completed their master's. They returned in July 2021 as the laboratory technician for the KNI.

Education

Kelly received their M.S. in Materials Science from Caltech and B.S. degrees in Electrical Engineering and in Physics from the University of Arkansas at Fayetteville.

Managed Equipment

Chemical Vapor Deposition (CVD)

• Atomic Layer Deposition (ALD): Oxford Instruments FlexAL II
• Plasma-Enhanced Chemical Vapor Deposition (PECVD): Oxford Instruments System 100

Dry Etching

• Silicon Etcher: Oxford Instruments DRIE System 100 Bosch & Cryo ICP-RIE
• III-V Material, Metal & Silicon Etcher: Oxford Instruments System 100 ICP-RIE
• Dielectric Material Etcher: Oxford Instruments Dielectric System 100 ICP-RIE
• Silicon, III-V Material & Organics Etcher: Plasma-Therm Dual Chamber RIE

Thermal Processing

• Tube Furnaces: Tystar Tytan 1 & 2 (Wet & Dry Oxidation and Annealing)