Difference between revisions of "Equipment List"

From the KNI Lab at Caltech
Jump to navigation Jump to search
Line 51: Line 51:
* [[Nova 200 NanoLab: SEM, EDS & WDS | SEM/EDS/WDS: Thermo Fisher Nova 200 NanoLab]]
* [[Nova 200 NanoLab: SEM, EDS & WDS | SEM/EDS/WDS: Thermo Fisher Nova 200 NanoLab]]
* [[Sirion: SEM & EDS | SEM/EDS: Thermo Fisher Sirion]]
* [[Sirion: SEM & EDS | SEM/EDS: Thermo Fisher Sirion]]
* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | SEM/ESEM: Thermo Fisher Quanta 200F]]
* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | SEM/ESEM/Lithography/Probe Station: Thermo Fisher Quanta 200F]]
* [[Nova_600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|SEM/Ga-FIB/GIS/Omniprobe: Thermo Fisher Nova 600 NanoLab]]
* [[Nova_600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|SEM/Ga-FIB/GIS/Omniprobe: Thermo Fisher Nova 600 NanoLab]]
===== Transmission Electron Microscopes (TEMs) =====
===== Transmission Electron Microscopes (TEMs) =====
* [[Tecnai TF-30: 300 kV TEM, STEM, EDS & HAADF | TEM/STEM/EDS/HAADF: Thermo Fisher Tecnai TF-30 (80-300 kV)]]
* [[Tecnai TF-30: 300 kV TEM, STEM, EDS & HAADF | TEM/STEM/EDS/HAADF: Thermo Fisher Tecnai TF-30 (80-300 kV)]]

Revision as of 00:58, 25 April 2019

Lithography

Electron Beam Lithography
Ion Beam Lithography
Optical Lithography

Deposition

Evaporation
Sputtering
Chemical Vapor Deposition (CVD)
Dielectric Packaging / Moisture Barrier

Etching

Dry Etching
Wet Etching

Microscopy

Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)
Scanning Probe Microscopes
Optical Characterization

Support Tools

Thermal Processing
Substrate Processing
Device Processing