Difference between revisions of "Equipment List"

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= Microscopy =
 
= Microscopy =
 
===== Focused Ion Beam (FIB) Systems =====
 
===== Focused Ion Beam (FIB) Systems =====
* [[ORION NanoFab: Helium, Neon & Gallium FIB | He/Ne/Ga-FIB: Zeiss ORION NanoFab]]
+
* [[ORION NanoFab: Helium, Neon & Gallium FIB | Helium, Neon & Gallium FIB: Zeiss ORION NanoFab]]
* [[Nova_600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|SEM/Ga-FIB/GIS/Omniprobe: Thermo Fisher Nova 600 NanoLab]]
+
* [[Nova_600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|SEM, Ga-FIB, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab]]
  
 
===== Scanning Electron Microscopes (SEMs) =====
 
===== Scanning Electron Microscopes (SEMs) =====
* [[Nova 200 NanoLab: SEM, EDS & WDS | SEM/EDS/WDS: Thermo Fisher Nova 200 NanoLab]]
+
* [[Nova 200 NanoLab: SEM, EDS & WDS | SEM, EDS & WDS: Thermo Fisher Nova 200 NanoLab]]
* [[Sirion: SEM & EDS | SEM/EDS: Thermo Fisher Sirion]]
+
* [[Sirion: SEM & EDS | SEM & EDS: Thermo Fisher Sirion]]
* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | SEM/ESEM/Lithography/Probe Station: Thermo Fisher Quanta 200F]]
+
* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | SEM, ESEM, Lithography & Probe Station: Thermo Fisher Quanta 200F]]
* [[Nova_600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|SEM/Ga-FIB/GIS/Omniprobe: Thermo Fisher Nova 600 NanoLab]]
+
* [[Nova_600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|SEM, Ga-FIB, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab]]
  
 
===== Transmission Electron Microscopes (TEMs) =====
 
===== Transmission Electron Microscopes (TEMs) =====
* [[Tecnai TF-30: 300 kV TEM, STEM, EDS & HAADF | TEM/STEM/EDS/HAADF: Thermo Fisher Tecnai TF-30 (80-300 kV)]]
+
* [[Tecnai TF-30: 300 kV TEM, STEM, EDS & HAADF | TEM, STEM, EDS & HAADF: Thermo Fisher Tecnai TF-30 (80-300 kV)]]
* [[Tecnai TF-20: 200 kV TEM, STEM, EDS, EELS, EFTEM & Lithography | TEM/STEM/EDS/EELS/EFTEM/NPGS: Thermo Fisher Tecnai TF-20 (80-200 kV)]]
+
* [[Tecnai TF-20: 200 kV TEM, STEM, EDS, EELS, EFTEM & Lithography | TEM, STEM, EDS, EELS, EFTEM & Lithography: Thermo Fisher Tecnai TF-20 (80-200 kV)]]
  
 
===== Scanning Probe Microscopes =====
 
===== Scanning Probe Microscopes =====

Revision as of 01:01, 25 April 2019

Lithography

Electron Beam Lithography
Ion Beam Lithography
Optical Lithography

Deposition

Evaporation
Sputtering
Chemical Vapor Deposition (CVD)
Dielectric Packaging / Moisture Barrier

Etching

Dry Etching
Wet Etching

Microscopy

Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)
Scanning Probe Microscopes
Optical Characterization

Support Tools

Thermal Processing
Substrate Processing
Device Processing