Difference between revisions of "Equipment List"

From the KNI Lab at Caltech
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* [[EBPG 5200: 100 kV Electron Beam Lithography | Electron Beam Pattern Generator: Raith EBPG 5200 (100 kV)]]
 
* [[EBPG 5200: 100 kV Electron Beam Lithography | Electron Beam Pattern Generator: Raith EBPG 5200 (100 kV)]]
 
* [[EBPG 5000+: 100 kV Electron Beam Lithography | Electron Beam Pattern Generator: Raith EBPG 5000+ (100 kV)]]
 
* [[EBPG 5000+: 100 kV Electron Beam Lithography | Electron Beam Pattern Generator: Raith EBPG 5000+ (100 kV)]]
* [[Quanta 200F: SEM, ESEM & Probe Station | Nanometer Pattern Generation System: Thermo Fisher Quanta 200F SEM with NPGS (1-30 kV)]]
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* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | Nanometer Pattern Generation System: Thermo Fisher Quanta 200F SEM with NPGS (1-30 kV)]]
 
* [[Tecnai TF-20: 200 kV TEM, STEM, EDS, EELS, EFTEM & Lithography | Nanometer Pattern Generation System: Thermo Fisher Tecnai TF-20 S/TEM with NPGS (80-200 kV)]]
 
* [[Tecnai TF-20: 200 kV TEM, STEM, EDS, EELS, EFTEM & Lithography | Nanometer Pattern Generation System: Thermo Fisher Tecnai TF-20 S/TEM with NPGS (80-200 kV)]]
  
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* [[Nova 200 NanoLab: SEM, EDS & WDS | SEM/EDS/WDS: Thermo Fisher Nova 200 NanoLab]]
 
* [[Nova 200 NanoLab: SEM, EDS & WDS | SEM/EDS/WDS: Thermo Fisher Nova 200 NanoLab]]
 
* [[Sirion: SEM & EDS | SEM/EDS: Thermo Fisher Sirion]]
 
* [[Sirion: SEM & EDS | SEM/EDS: Thermo Fisher Sirion]]
* [[Quanta 200F: SEM, ESEM & Probe Station | SEM/ESEM: Thermo Fisher Quanta 200F]]
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* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | SEM/ESEM: Thermo Fisher Quanta 200F]]
 
* [[Nova_600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|SEM/Ga-FIB/GIS/Omniprobe: Thermo Fisher Nova 600 NanoLab]]
 
* [[Nova_600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|SEM/Ga-FIB/GIS/Omniprobe: Thermo Fisher Nova 600 NanoLab]]
 
===== Transmission Electron Microscopes (TEMs) =====
 
===== Transmission Electron Microscopes (TEMs) =====

Revision as of 00:25, 25 April 2019

Lithography

Electron Beam Lithography
Ion Beam Lithography
Optical Lithography

Deposition

Evaporation
Sputtering
Chemical Vapor Deposition (CVD)
Dielectric Packaging / Moisture Barrier

Etching

Dry Etching
Wet Etching

Microscopy

Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)
Scanning Probe Microscopes
Optical Characterization

Support Tools

Thermal Processing
Substrate Processing
Device Processing