Difference between revisions of "Equipment List"

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* [[Tecnai TF-20: 200 kV TEM, STEM, EDS, EELS, EFTEM & Lithography | TEM, STEM, EDS, EELS, EFTEM & Lithography: Thermo Fisher Tecnai TF-20 (80-200 kV)]]
 
* [[Tecnai TF-20: 200 kV TEM, STEM, EDS, EELS, EFTEM & Lithography | TEM, STEM, EDS, EELS, EFTEM & Lithography: Thermo Fisher Tecnai TF-20 (80-200 kV)]]
 
===== Scanning Probe Microscopes =====
 
===== Scanning Probe Microscopes =====
* [[Dimension ICON: Atomic Force Microscope (AFM) | Atomic Force Microscope (AFM): Bruker Dimension ICON]]
+
* [[Dimension ICON: Atomic Force Microscope (AFM) | Atomic Force Microscope (AFM): Bruker Dimension Icon]]
 
* [[Veeco Dektak 3ST: Profilometer | Profilometer: Veeco Dektak 3ST]]
 
* [[Veeco Dektak 3ST: Profilometer | Profilometer: Veeco Dektak 3ST]]
 +
 
===== Optical Characterization =====
 
===== Optical Characterization =====
 
* [[Woolam M-2000: Spectroscopic Ellipsometer | Spectroscopic Ellipsometry: Woolam M-2000]]
 
* [[Woolam M-2000: Spectroscopic Ellipsometer | Spectroscopic Ellipsometry: Woolam M-2000]]

Revision as of 01:07, 7 May 2019

Lithography

Electron Beam Lithography
Ion Beam Lithography
Optical Lithography

Deposition

Evaporation
Sputtering
Chemical Vapor Deposition (CVD)
Dielectric Packaging / Moisture Barrier

Etching

Dry Etching
Wet Etching

Microscopy

Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)
Scanning Probe Microscopes
Optical Characterization
Sample Preparation for Microscopy

Support Tools

Thermal Processing
Substrate Processing
Device Processing
Sample Preparation