The Heidelberg Instruments DWL-66 is a tool for mask making and for direct patterning of wafers by the use of a HeCd laser. Precise control of the laser head and alignment produces 800-nm resolution lithography. The DWL 66 is an extremely high-resolution imaging system where over half a million dpi (dots per inch) is achieved using a 40-nm writeable address grid for exposing chrome plates or wafers.
Email the tool manager for reservations that do not follow the reservation policy BEFORE scheduling the reservation. Your reservation can be cancelled any time by the tool manager if it does not follow the tool reservation policy.
