Digital Microscope Keyence VHX7000: Difference between revisions

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{{InstrumentInfoboxOneImage|
{{InstrumentInfoboxOneImage|
|InstrumentName = Suss Contact Mask Aligner MA6/BA6
|InstrumentName = Keyence VHX-7000
|HeaderColor = #FFFFFF
|HeaderColor = #FFFFFF
|ImageOne = Mask-Aligner_Suss-MicroTec-MA6-BA6.jpg
|ImageOne = Keyence VHX-7000.jpg
|ImageTwo = Instrument-Image.jpg
|InstrumentType = [[Equipment_List#Metrology|Metrology]],<br>[[Equipment_List#Optical Characterization|Optical Characterization]]
|InstrumentType = [[Equipment_List#Lithography|Lithography]]
|RoomLocation = B217 Steele
|RoomLocation = B217 Steele
|LabPhone = 626-395-1535
|LabPhone = 626-395-1535
|PrimaryStaff = Alireza Ghaffari
|PrimaryStaff = Alex Wertheim
|StaffEmail = alireza@caltech.edu
|StaffEmail = alexw@caltech.edu
|StaffPhone = 626-395-3984
|StaffPhone = 626-395-4075
|Manufacturer = Suss MicroTec
|Manufacturer = Keyence Corporation
|Model = MA6 & MA6/BA6
|Model = VHX-7000
|Techniques = Frontside Alignment,<br>Backside Alignment,</br>Flood exposure
|Techniques = 2D/3D measurements<br>Digital Camera</br>High Magnification Inspection
|EmailList = kni-photolith
|EmailListName =  Photolithography
}}
}}
== Description ==
== Description ==
[[Image:Mask-Aligner_Suss-MicroTec-MA6.jpg|thumb|upright=1.12|Suss MicroTec model MA6 Mask Aligner (model MA6/BA6 is shown at the top of the infobox)]]
[[Image:Keyence VHX-7000 closeup.jpg|thumb|upright=1.12|Keyence Corporation model VHX-7000]]


The Keyence VHX Series 4K Digital Microscope uses high-resolution 4K imaging and advanced analysis software for high-magnification imaging, 2D/3D measurements, and more.  The VHX Series has a depth of field that is 20 times greater than conventional optical microscopes.  2D and 3D measurements for roughness, contamination, grain size, and other measurements can be performed.  The digital images can be saved in their original form or with measurements applied.   
The Keyence VHX Series 4K Digital Microscope uses high-resolution 4K imaging and advanced analysis software for high-magnification imaging, 2D/3D measurements, and more.  The VHX Series has a depth of field that is 20 times greater than conventional optical microscopes.  2D and 3D measurements for roughness, contamination, grain size, and other measurements can be performed.  The digital images can be saved in their original form or with measurements applied.   
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* coming soon
* coming soon
=== Manufacturer Manuals ===
=== Manufacturer Manuals ===
* coming soon
* [https://caltech.box.com/s/xoegl6wje7foaq65osiqei1bzwbwgwhv Keyence VHX-7000 Manual]


== Related Instrumentation in the KNI ==
== Related Instrumentation in the KNI ==
=== Metrology ===
* [[Dektak 3ST: Profilometer | Profilometer: Veeco Dektak 3ST]]
* [[Electrical Probing Station | Electrical Probing Station: Cascade Microtech M150]]
* [[Spectroscopic Ellipsometer | Spectroscopic Ellipsometer: Woolam M-2000]]
* [[Light Microscope with Spectroscopic Reflectometer | Light Microscope: Olympus BX51M with Filmetrics Spectroscopic Reflectometer]]
* Light Microscope Nikon L200 / Nikon Camera - [https://caltech.box.com/s/3sxmh6pt073a7qgpohgzjdl53acmr2ho Nikon L200/L200D Manual], [https://caltech.box.com/s/4fmfx7mazcdpjy0edqbgi4e1jbb7azdy Nikon L200 Operation Quick Reference]
=== Optical Characterization ===
=== Optical Characterization ===
* [[Fluorescence Microscope | Fluorescence Microscope: Olympus IX81]]
* [[Fluorescence Microscope | Fluorescence Microscope: Olympus IX81]]
* [[Light Microscope with Spectroscopic Reflectometer | Light Microscope: Olympus BX51M with Filmetrics Spectroscopic Reflectometer]]
* [[Light Microscope with Spectroscopic Reflectometer | Light Microscope: Olympus BX51M with Filmetrics Spectroscopic Reflectometer]]
* [[Spectroscopic Ellipsometer | Spectroscopic Ellipsometer: Woolam M-2000]]
* [[Spectroscopic Ellipsometer | Spectroscopic Ellipsometer: Woolam M-2000]]
=== Scanning Electron Microscopes (SEMs) ===
* [[Nova 200 NanoLab: SEM & EDS | Nova 200 NanoLab: SEM & EDS]]
* [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|SEM, Ga-FIB, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab]]
* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | SEM, ESEM, Lithography & Probe Station: Thermo Fisher Quanta 200F]]
* [[Sirion: SEM & EDS | Sirion: SEM & EDS]]
=== Scanning Probe Microscopes ===
* [[Dimension Icon: Atomic Force Microscope (AFM) | Atomic Force Microscope (AFM): Bruker Dimension Icon]]

Latest revision as of 19:20, 18 December 2023

Keyence VHX-7000
Keyence VHX-7000.jpg
Instrument Type Metrology,
Optical Characterization
Techniques 2D/3D measurements
Digital Camera
High Magnification Inspection
Staff Manager Alex Wertheim
Staff Email alexw@caltech.edu
Staff Phone 626-395-4075
Reserve time on FBS
Request training via FBS User Dashboard
Lab Location B217 Steele
Lab Phone 626-395-1535
Manufacturer Keyence Corporation
Model VHX-7000

Description

Keyence Corporation model VHX-7000

The Keyence VHX Series 4K Digital Microscope uses high-resolution 4K imaging and advanced analysis software for high-magnification imaging, 2D/3D measurements, and more. The VHX Series has a depth of field that is 20 times greater than conventional optical microscopes. 2D and 3D measurements for roughness, contamination, grain size, and other measurements can be performed. The digital images can be saved in their original form or with measurements applied.

Objectives Available

  • Low Magnification Lens = 20-100x
  • Medium Magnification Lens = 100-500x
  • High Magnification Lens = 500-2500x
  • Highest Magnification Lens = 2500-6000x

Resources

SOPs & Troubleshooting

  • coming soon

Manufacturer Manuals

Related Instrumentation in the KNI

Metrology

Optical Characterization

Scanning Electron Microscopes (SEMs)

Scanning Probe Microscopes