Digital Microscope Keyence VHX7000: Difference between revisions

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(Created page with "{{InstrumentInfoboxOneImage| |InstrumentName = Suss Contact Mask Aligner MA6/BA6 |HeaderColor = #FFFFFF |ImageOne = Mask-Aligner_Suss-MicroTec-MA6-BA6.jpg |ImageTwo = Instrument-Image.jpg |InstrumentType = Lithography |RoomLocation = B217 Steele |LabPhone = 626-395-1535 |PrimaryStaff = Alireza Ghaffari |StaffEmail = alireza@caltech.edu |StaffPhone = 626-395-3984 |Manufacturer = Suss MicroTec |Model = MA6 & MA6/BA6 |Techniques = Frontside Al...")
 
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{{InstrumentInfoboxOneImage|
{{InstrumentInfoboxOneImage|
|InstrumentName = Suss Contact Mask Aligner MA6/BA6
|InstrumentName = Keyence VHX-7000
|HeaderColor = #FFFFFF
|HeaderColor = #FFFFFF
|ImageOne = Mask-Aligner_Suss-MicroTec-MA6-BA6.jpg
|ImageOne = Keyence VHX-7000.jpg
|ImageTwo = Instrument-Image.jpg
|InstrumentType = [[Equipment_List#Metrology|Metrology]],<br>[[Equipment_List#Optical Characterization|Optical Characterization]]
|InstrumentType = [[Equipment_List#Lithography|Lithography]]
|RoomLocation = B217 Steele
|RoomLocation = B217 Steele
|LabPhone = 626-395-1535
|LabPhone = 626-395-1535
|PrimaryStaff = Alireza Ghaffari
|PrimaryStaff = Alex Wertheim
|StaffEmail = alireza@caltech.edu
|StaffEmail = alexw@caltech.edu
|StaffPhone = 626-395-3984
|StaffPhone = 626-395-4075
|Manufacturer = Suss MicroTec
|Manufacturer = Keyence Corporation
|Model = MA6 & MA6/BA6
|Model = VHX-7000
|Techniques = Frontside Alignment,<br>Backside Alignment,</br>Flood exposure
|Techniques = 2D/3D measurements<br>Digital Camera</br>High Magnification Inspection
|EmailList = kni-photolith
|EmailListName =  Photolithography
}}
}}
== Description ==
== Description ==
[[Image:Mask-Aligner_Suss-MicroTec-MA6.jpg|thumb|upright=1.12|Suss MicroTec model MA6 Mask Aligner (model MA6/BA6 is shown at the top of the infobox)]]
[[Image:Keyence VHX-7000 closeup.jpg|thumb|upright=1.12|Keyence Corporation model VHX-7000]]
The contact mask aligner is a tool that enables front- and back-side alignment of photo masks to create structures as small as 500 nm on sample sizes up to 6 inches. These systems are ideally suited for rapid definition of sub-micron devices through contact printing, and enable the high-resolution alignment of several lithographic layers to define complex devices. They are typically used to define contacts and connections to the nanostructures that are defined using the KNI's other fabrication instruments (e.g. e-beam lithography). The MA6/BA6 is also configured to do bond aligning in support of the Suss Microtec SB6L Wafer Bonder.
==== Suss1 MA6/BA6 Applications ====
* Front Side Flood Exposure (no mask)
* Front Side Alignment & Exposure
* Back Side Alignment with Front Side Exposure


==== Suss2 MA6 Applications ====
The Keyence VHX Series 4K Digital Microscope uses high-resolution 4K imaging and advanced analysis software for high-magnification imaging, 2D/3D measurements, and more.  The VHX Series has a depth of field that is 20 times greater than conventional optical microscopes.  2D and 3D measurements for roughness, contamination, grain size, and other measurements can be performed.  The digital images can be saved in their original form or with measurements applied. 
* Front Side Alignment & Exposure
 
* Back Side Alignment with Front Side Exposure
==== Objectives Available ====
* Low Magnification Lens = 20-100x
* Medium Magnification Lens = 100-500x
* High Magnification Lens = 500-2500x
* Highest Magnification Lens = 2500-6000x


== Resources ==
== Resources ==
=== Manufacturer Specifications ===
* Whole wafers 2” up to 6” can be loaded.
* Samples pieces up to 6”x6” square can be loaded.
* Samples up to 6mm thick can be loaded..
* Exposure Resolution:
::Soft Contact Mode = 1 - 2 um
::Hard Contact Mode = 1 um
::Soft Vacuum Contact Mode = 1 - 0.5 um
::Vacuum Contact Mode = 0.4 - 0.5 um
''' Suss 1 Exposure Settings '''
* Channel 1 is 365nm wavelength at 15 mW/cm2.
* Channel 2 is 405nm wavelength at 25 mW/cm2.
''' Suss 2 Exposure Settings '''
* Channel 1 is 365nm wavelength at 10 mW/cm2.
* Channel 2 is 405nm wavelength at 15 mW/cm2.


=== SOPs & Troubleshooting ===
=== SOPs & Troubleshooting ===
* [https://caltech.box.com/s/gkhncvqe25uccym7cs5aj0n00krbmnw1 General SOP & Troubleshooting]
* coming soon
* [https://caltech.box.com/s/bbk4f9vi6jerhi9fcqoqa78n5npkwxkr Lamp Change SOP]
=== Manufacturer Manuals ===
* [https://caltech.box.com/s/mj01k4mxgsxbnctv3fayzaje1ph4bfop Lamp Re-Ignition SOP]
* [https://caltech.box.com/s/xoegl6wje7foaq65osiqei1bzwbwgwhv Keyence VHX-7000 Manual]
* [https://caltech.box.com/s/xq40xbslhezrn4dyrblsgxrojd21lb8g Suss 1 Lamp Re-Ignition Video]
* [https://caltech.box.com/s/f5f4z86p8v9i43nvs7ntbgkzrog44jpm Suss 2 Lamp Re-Ignition Video]
Manufacturer Manuals
* [https://caltech.box.com/s/81h0w7viflquujpc960x76os52oinv1f Suss MA6/BA6 System Manual]
* [https://caltech.box.com/s/0bdk31f09vxui62c096lhaiguzgkc1cu Suss MA6/BA6 Brochure]
* [https://caltech.box.com/s/fxyqt4fkpb6x1c0li2l84wjose5x0wke Lamp Power Supply Manual]
* [https://caltech.box.com/s/e1b5co1cb4hwbu21ala3cnqt888tma7f Alignment Mark Suggestion Document]


==== Labrunr Reservation Rules:====
== Related Instrumentation in the KNI ==
{| class="wikitable"
|-
!  !! Advanced Res (days) !! Limit per Res (hrs) !! Limit per week (hrs)
|-
| Weekday || 7 || 4 || 12
|-
| Weeknight || 7 || 6 || 18
|-
| Weekend || 14 || 6 || 18
|}
'''  For reservations that DO NOT follow the reservation policy, email the tool manager BEFORE scheduling.'''
''  Your reservation can be cancelled at any time by the tool manager if it does not follow the tool reservation policy.''
 
===== Equipment Status =====
* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Suss1 or Suss2 from the dropdown menu)


=== Optical Lithography Resources ===
=== Metrology ===
* [[Optical Lithography Resources | Optical Lithography Resources Page]]
* [[Dektak 3ST: Profilometer | Profilometer: Veeco Dektak 3ST]]
* [https://caltech.box.com/s/jsetuvrq4ec1alqvn25pz11kmtzuw8rc Laurell Spinner Cleaning SOP]
* [[Electrical Probing Station | Electrical Probing Station: Cascade Microtech M150]]
* [https://caltech.box.com/s/evjv6kciuamgl42moa8vug60dpc0gimp Laurell Spinner - Spinning Resist Video]
* [[Spectroscopic Ellipsometer | Spectroscopic Ellipsometer: Woolam M-2000]]
* [[Light Microscope with Spectroscopic Reflectometer | Light Microscope: Olympus BX51M with Filmetrics Spectroscopic Reflectometer]]
* Light Microscope Nikon L200 / Nikon Camera - [https://caltech.box.com/s/3sxmh6pt073a7qgpohgzjdl53acmr2ho Nikon L200/L200D Manual], [https://caltech.box.com/s/4fmfx7mazcdpjy0edqbgi4e1jbb7azdy Nikon L200 Operation Quick Reference]


=== Process Recipes ===
=== Optical Characterization ===
* [https://lab.kni.caltech.edu/index.php/Process_Recipe_Library#Optical_Lithography Optical Lithography Photoresist Recipes]
* [[Fluorescence Microscope | Fluorescence Microscope: Olympus IX81]]
* [[Light Microscope with Spectroscopic Reflectometer | Light Microscope: Olympus BX51M with Filmetrics Spectroscopic Reflectometer]]
* [[Spectroscopic Ellipsometer | Spectroscopic Ellipsometer: Woolam M-2000]]


=== Scanning Electron Microscopes (SEMs) ===
* [[Nova 200 NanoLab: SEM & EDS | Nova 200 NanoLab: SEM & EDS]]
* [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|SEM, Ga-FIB, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab]]
* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | SEM, ESEM, Lithography & Probe Station: Thermo Fisher Quanta 200F]]
* [[Sirion: SEM & EDS | Sirion: SEM & EDS]]


== Related Instrumentation in the KNI ==
=== Scanning Probe Microscopes ===
=== Optical Lithography ===
* [[Dimension Icon: Atomic Force Microscope (AFM) | Atomic Force Microscope (AFM): Bruker Dimension Icon]]
* [[Wafer Stepper | i-Line Wafer Stepper: GCA model 6300]]
* [[CNI-PV 2.1: Nano Imprint Lithography | Nano Imprint Lithography: NILT CNI-PV 2.1]]
* [[DWL-66: Direct-Write Laser System | Direct-Write Laser System: Heidelberg Instruments DWL-66]]
* [[Nanoscribe PPGT: Microscale 3D Printer | Two-Photon Lithography (aka Microscale 3D Printing): Nanoscribe Photonic Professional GT]]
* [[Optical Lithography Resources]]
=== Electron Beam Lithography ===
* [[EBPG 5200: 100 kV Electron Beam Lithography|EBPG 5200: 100 kV Electron Beam Lithography]]
* [[EBPG 5000+: 100 kV Electron Beam Lithography | EBPG 5000+: 100 kV Electron Beam Lithography]]
* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | Quanta 200F: SEM with 1-30 kV Electron Beam Lithography]]
* [[Tecnai TF-20: 200 kV TEM, STEM, EDS, EELS, EFTEM & Lithography | Tecnai TF-20: TEM & STEM with 80-200 kV Electron Beam Lithography]]
=== Ion Beam Lithography ===
* [[ORION NanoFab: Helium, Neon & Gallium FIB | ORION NanoFab: Helium (5-40 kV), Neon (5-35 kV) & Gallium (1-30 kV) Focused Ion Beam Lithography & Microscopy]]

Latest revision as of 19:20, 18 December 2023

Keyence VHX-7000
Keyence VHX-7000.jpg
Instrument Type Metrology,
Optical Characterization
Techniques 2D/3D measurements
Digital Camera
High Magnification Inspection
Staff Manager Alex Wertheim
Staff Email alexw@caltech.edu
Staff Phone 626-395-4075
Reserve time on FBS
Request training via FBS User Dashboard
Lab Location B217 Steele
Lab Phone 626-395-1535
Manufacturer Keyence Corporation
Model VHX-7000

Description

Keyence Corporation model VHX-7000

The Keyence VHX Series 4K Digital Microscope uses high-resolution 4K imaging and advanced analysis software for high-magnification imaging, 2D/3D measurements, and more. The VHX Series has a depth of field that is 20 times greater than conventional optical microscopes. 2D and 3D measurements for roughness, contamination, grain size, and other measurements can be performed. The digital images can be saved in their original form or with measurements applied.

Objectives Available

  • Low Magnification Lens = 20-100x
  • Medium Magnification Lens = 100-500x
  • High Magnification Lens = 500-2500x
  • Highest Magnification Lens = 2500-6000x

Resources

SOPs & Troubleshooting

  • coming soon

Manufacturer Manuals

Related Instrumentation in the KNI

Metrology

Optical Characterization

Scanning Electron Microscopes (SEMs)

Scanning Probe Microscopes

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