AJA Orion ATC Series Electron Beam Evaporator: Difference between revisions
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Revision as of 22:44, 26 July 2023
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Description
Applications
- Metal deposition
- Oxide deposition
- Lift-off
Resources
Equipment Status
- LabRunr Equipment Status (Select AJA Orion E-Beam Evaporator from the dropdown menu)
SOPs & Troubleshooting
- [linkgoeshere KNI SOP]
- [linkgoeshere Troubleshooting Guide]
Tool Reservation Rules
| Advanced Reservation (days) | Limit per Reservation (hrs) | Limit per week (hrs) | |
|---|---|---|---|
| Weekday | 7 | 6 | 18 |
| Weeknight | 7 | 8 | 18 |
| Weekend | 7 | 12 | 18 |
Video Tutorials
- [linkgoeshere General System Operation]
- [linkgoeshere In-Situ Crucible Exchange]
Specifications
Hardware Specifications
- Typical base pressure: <5E-9 Torr
- All dry pumping system (cryo & scroll pumps)
- Load-lock-equipped system with automatic wafer transfer
- Evaporation Source: 1x single emitter, 6-pocket e-beam evaporation source
- Pockets 1-4 allow in-situ crucible exchange through dedicated secondary load lock, allowing for crucible swap without breaking UHV chamber conditions.
- Accepts up to 1x 150mm wafer or smaller wafers/pieces
- Optional lift-off dome holds 4x 100mm wafers for batch processing
- Camera for E-Beam/Crucible observation during process
- Inficon CrystalSix(TM)
- 6-crystal QCM with automatic crystal switching in event of crystal fail or low Q. Enables long periods of maintained UHV conditions without requiring venting to exchange crystals
- Programmable deposition processes