Tube Furnaces for Wet & Dry Processing

From the KNI Lab at Caltech
Revision as of 21:18, 24 May 2019 by Nathslee (talk | contribs) (Created page with "{{InstrumentInfoboxOneImage| |InstrumentName = Tystar Tytan Tube Furnaces 1 & 2 |HeaderColor = #E6E7E8 |ImageOne = |ImageTwo = |InstrumentType = Equipment_List#Support_Too...")
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to navigation Jump to search
Tystar Tytan Tube Furnaces 1 & 2
[[image:|320x373px|center|]]
Instrument Type Support Tools
Techniques Oxidation/Annealing
Staff Manager Nathan S. Lee
Staff Email nathslee@caltech.edu
Staff Phone 626-395-1319
Reserve time on LabRunr
Request training by email
Sign up for tystar email list
Lab Location
Lab Phone 626-395-1532
Manufacturer Tystar Corporation
Model Tystar Tytan Horizontal Diffusion Furnace

Description

The system is designed for processing up to 100 ea. 150 mm (6") wafers per tube. Tube 1 is designated for Wet/Dry oxidation using Flask Evaporator. Tube 2 is designated for Dry oxidation/Anneal.

Applications
  • Dry/Wet oxidation
  • Annealing