Tube Furnaces for Wet & Dry Processing

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Tystar Tytan Tube Furnaces 1 & 2
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Instrument Type Support Tools
Techniques Oxidation/Annealing
Staff Manager Nathan S. Lee
Staff Email nathslee@caltech.edu
Staff Phone 626-395-1319
Reserve time on LabRunr
Request training by email
Sign up for tystar email list
Lab Location
Lab Phone 626-395-1532
Manufacturer Tystar Corporation
Model Tystar Tytan Horizontal Diffusion Furnace

Description

The system is designed for processing up to 100 ea. 150 mm (6") wafers per tube. Tube 1 is designated for Wet/Dry oxidation using Flask Evaporator. Tube 2 is designated for Dry oxidation/Anneal.

Applications
  • Dry/Wet oxidation
  • Annealing

Resources

SOPs & Troubleshooting