Difference between revisions of "Tube Furnaces for Wet & Dry Processing"

From the KNI Lab at Caltech
Jump to navigation Jump to search
(update primary staff)
Line 7: Line 7:
|RoomLocation = B235 Steele
|RoomLocation = B235 Steele
|LabPhone = 626-395-1532
|LabPhone = 626-395-1532
|PrimaryStaff = [[Nathan S. Lee]]
|PrimaryStaff = [[Kelly McKenzie]]
|StaffEmail = nathslee@caltech.edu
|StaffEmail = kmmckenz@caltech.edu
|StaffPhone = 626-395-1319
|StaffPhone = 626-395-5732
|Manufacturer = Tystar Corporation
|Manufacturer = Tystar Corporation
|Model = Tytan Horizontal<br>Diffusion Furnace
|Model = Tytan Horizontal<br>Diffusion Furnace

Revision as of 23:31, 21 September 2021

Tystar Tytan Tube Furnaces 1 & 2
Instrument Type Support Tools,
Thermal Processing
Techniques Oxidation, Annealing
Staff Manager Kelly McKenzie
Staff Email kmmckenz@caltech.edu
Staff Phone 626-395-5732
Reserve time on LabRunr
Request training by email
Sign up for Tystar email list
Lab Location B235 Steele
Lab Phone 626-395-1532
Manufacturer Tystar Corporation
Model Tytan Horizontal
Diffusion Furnace


The system is designed for processing up to one-hundred, 150 mm (6") wafers per tube. Tube 1 is designated for wet & dry oxidation using a flask evaporator. Tube 2 is designated for dry oxidation and annealing.

  • Dry & Wet oxidation
  • Annealing


Equipment Data
Tystar Oxidation Recipe
SOPs & Troubleshooting