Difference between revisions of "Tube Furnaces for Wet & Dry Processing"

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* Annealing
* Annealing
== Resources ==
== Resources ==
===== Tystar Oxidation Recipe =====
* [https://caltech.box.com/s/nqiiqwlhip4dcult2mtuvvdlxw0gv086 Wet Oxidation 1000C ]
===== SOPs & Troubleshooting =====
===== SOPs & Troubleshooting =====
* [https://caltech.box.com/s/yrvj5tar3r2e2ldq9orm2bh5mlkavw05 KNI SOP ]
* [https://caltech.box.com/s/yrvj5tar3r2e2ldq9orm2bh5mlkavw05 KNI SOP ]

Revision as of 19:40, 11 March 2020

Tystar Tytan Tube Furnaces 1 & 2
Tystar-Tytan-Tube-Furnaces.jpg
Instrument Type Support Tools,
Thermal Processing
Techniques Oxidation, Annealing
Staff Manager Nathan S. Lee
Staff Email nathslee@caltech.edu
Staff Phone 626-395-1319
Reserve time on LabRunr
Request training by email
Sign up for Tystar email list
Lab Location B235 Steele
Lab Phone 626-395-1532
Manufacturer Tystar Corporation
Model Tytan Horizontal
Diffusion Furnace

Description

The system is designed for processing up to one-hundred, 150 mm (6") wafers per tube. Tube 1 is designated for wet & dry oxidation using a flask evaporator. Tube 2 is designated for dry oxidation and annealing.

Applications
  • Dry & Wet oxidation
  • Annealing

Resources

Tystar Oxidation Recipe
SOPs & Troubleshooting