Difference between revisions of "Tube Furnaces for Wet & Dry Processing"

From the KNI Lab at Caltech
Jump to navigation Jump to search
Line 13: Line 13:
|Model = Tytan Horizontal<br>Diffusion Furnace
|Model = Tytan Horizontal<br>Diffusion Furnace
|Techniques = Oxidation, Annealing
|Techniques = Oxidation, Annealing
|EmailList = kni-tystar@caltech.edu
|EmailList = kni-tystar
|EmailListName = Tystar
|EmailListName = Tystar

Revision as of 22:00, 20 February 2020

Tystar Tytan Tube Furnaces 1 & 2
Instrument Type Support Tools,
Thermal Processing
Techniques Oxidation, Annealing
Staff Manager Nathan S. Lee
Staff Email nathslee@caltech.edu
Staff Phone 626-395-1319
Reserve time on LabRunr
Request training by email
Sign up for Tystar email list
Lab Location B235 Steele
Lab Phone 626-395-1532
Manufacturer Tystar Corporation
Model Tytan Horizontal
Diffusion Furnace


The system is designed for processing up to one-hundred, 150 mm (6") wafers per tube. Tube 1 is designated for wet & dry oxidation using a flask evaporator. Tube 2 is designated for dry oxidation and annealing.

  • Dry & Wet oxidation
  • Annealing


SOPs & Troubleshooting