Difference between revisions of "Tube Furnaces for Wet & Dry Processing"

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(Created page with "{{InstrumentInfoboxOneImage| |InstrumentName = Tystar Tytan Tube Furnaces 1 & 2 |HeaderColor = #E6E7E8 |ImageOne = |ImageTwo = |InstrumentType = Equipment_List#Support_Too...")
 
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* Dry/Wet oxidation
* Dry/Wet oxidation
* Annealing
* Annealing
== Resources ==
===== SOPs & Troubleshooting =====
* [https://caltech.box.com/s/98cjegiimwwivn6zr9ltig1shfb5m6bb KNI SOP]

Revision as of 21:21, 24 May 2019

Tystar Tytan Tube Furnaces 1 & 2
[[image:|320x373px|center|]]
Instrument Type Support Tools
Techniques Oxidation/Annealing
Staff Manager Nathan S. Lee
Staff Email nathslee@caltech.edu
Staff Phone 626-395-1319
Reserve time on LabRunr
Request training by email
Sign up for tystar email list
Lab Location
Lab Phone 626-395-1532
Manufacturer Tystar Corporation
Model Tystar Tytan Horizontal Diffusion Furnace

Description

The system is designed for processing up to 100 ea. 150 mm (6") wafers per tube. Tube 1 is designated for Wet/Dry oxidation using Flask Evaporator. Tube 2 is designated for Dry oxidation/Anneal.

Applications
  • Dry/Wet oxidation
  • Annealing

Resources

SOPs & Troubleshooting