Difference between revisions of "Tecnai TF-30: 300 kV TEM, STEM, EDS & HAADF"

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|InstrumentName = Tecnai TF-30
|InstrumentName = Tecnai TF-30
|HeaderColor = #F5A81C
|HeaderColor = #F5A81C
|ImageOne = KNI-Si-and-Pt-Pillar.jpg
|ImageOne = Mouse-Footpad-Peripheral-Nerve-Fiber-3D-Tomography_Mark-S-Ladinksy.jpg
|ImageTwo = Tecnai-TF30.jpg
|ImageTwo = Tecnai-TF30.jpg
|InstrumentType = [[Equipment_List#Microscopy|Microscopy]]
|InstrumentType = [[Equipment_List#Microscopy|Microscopy]]
|RoomLocation = B242F Keck
|RoomLocation = B242F Keck
|LabPhone = 626-395-8908
|LabPhone = 626-395-8908
|PrimaryStaff = [[Matthew S. Hunt, PhD]]
|PrimaryStaff = [[Annalena Wolff]]
|StaffEmail = matthew.hunt@caltech.edu
|StaffEmail = awolff@caltech.edu
|StaffPhone = 626-395-5994
|StaffPhone = 626-395-5994
|Manufacturer = FEI (now Thermo Fisher)
|Manufacturer = FEI (now Thermo Fisher)
|Techniques = TEM, STEM,<br>Bright & Dark Field Imaging,<br>EDS, HAADF<br>Electron Diffraction,<br>Tomography
|Model = Tecnai TF-30
|RequestTraining = matthew.hunt@caltech.edu
|Techniques = TEM, STEM,<br>Bright & Dark Field Imaging,<br>EDS, HAADF,<br>Electron Diffraction,<br>Tomography
|RequestTraining = derose@caltech.edu
|EmailList = kni-tf30
|EmailList = kni-tf30
|EmailListName = TEM
|EmailListName = TF-30
}}
}}
== Description ==
== Description ==
The Nova 600 is a "dual beam" system that combines a field emission gun (FEG) scanning electron microscope (SEM) with a gallium focused ion beam (Ga-FIB). It can be used to capture high quality images (with sub-10 nm resolution) and perform site-specific etching and material deposition (with sub-50 nm resolution). It is also equipped with an Omniprobe nanomanipulator, which can be used to lift out lamella samples prepared for use in a transmission electron microscope (TEM). See a full list of training and educational resources for this instrument below.
[[Image:TF-30-Schematic-KNI-Caltech.jpg|thumb|top|upright=1.00|A schematic of the KNI's Tecnai TF-30 TEM/STEM. Modified from an original schematic that is courtesy of Portland State University.]]
The Tecnai TF-30 is a transmission electron microscope (TEM) that can also be operated in scanning transmission electron microscopy (STEM) mode, with a voltage range of 50 to 300 kV. Operating at 300 kV, the TF-30 <!---KNI's highest resolution TEM (see also the 200 kV [[Tecnai_TF-20:_200_kV_TEM,_STEM,_EDS,_EELS,_EFTEM_%26_Lithography | Tecnai TF-20]], which---> has analytical options such as EELS and EFTEM. The TF-30 is also equipped with a high-angle annular dark field (HAADF) detector for use in STEM mode, and an energy dispersive spectroscopy (EDS) detector for compositional analysis (in both TEM mode and, most often, in STEM mode). The Serial EM program allows for automated collection of images at variable tilt angles for performing tomography. See a full list of training and educational resources for this instrument below.
===== Applications =====
===== Applications =====
* High-Resolution TEM (HRTEM) imaging without an objective aperture
* High-Resolution TEM (HRTEM) imaging without an objective aperture
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* Selected Area Electron Diffraction (SAED)  
* Selected Area Electron Diffraction (SAED)  
* STEM imaging with a High-Angle Annular Dark Field (HAADF) detector
* STEM imaging with a High-Angle Annular Dark Field (HAADF) detector
* Energy Dispersive Spectroscopy (EDS) with Oxford INCA system
* Energy Dispersive Spectroscopy (EDS) with an Oxford INCA system
* Automatically capture tilt series of images for tomographic imaging
* Automatically capture tilt series of images for tomographic imaging


== Resources ==
== Resources ==
===== Equipment Status =====
* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Tecnai TF-30 from the dropdown menu)
===== SOPs & Troubleshooting =====
===== SOPs & Troubleshooting =====
* SEM SOPs ([https://caltech.box.com/s/4yv8f5att77k3zq1rm6p0mqhkd8quslh Short Version] | [https://caltech.box.com/s/xwjdudqdl793gkc5kl71zez5nnc5y2xb Long Version])
* [https://caltech.box.com/s/mpsxkxmf5y8wjw9daijwbudeoqkkeudu KNI Microscopy Policies]
* Ga-FIB SOPs ([https://caltech.box.com/s/8uch8ygjmesmjtdfy65xth47izib0prg Short Version] | [https://caltech.box.com/s/grg6j3rob7c4ciblom1tdshklq62oxqp Long Version])
* SOPs ([https://caltech.box.com/s/v7oih7yv8yxai5ybkg8znplc54xc99if Long Version] | [https://caltech.box.com/s/uq2x3x6jfbrwm7sll3zfvb4h4naip7rj Short, Conceptual Version])
* TEM Lamella Sample Preparation SOPs ([https://caltech.box.com/s/3l3w507dxwosuya3nbxgk30tdqyp4qy9 Short Version] | [https://caltech.box.com/s/pgioaribs7oj8r7g5nncmjjee2uyez2d Long Version])
* [https://caltech.box.com/s/lstv8e5zy94fnt3o0y7urfw41mpesd38 Procedure to Evaluate Selected Area Electron Diffraction (SAED) Patterns]
* [https://caltech.box.com/s/1nmp75l3166vj9t1vwwpwu2zyfc4j6ol Cutting & Imaging Cross-Sections SOP]
**[https://caltech.box.com/s/59upcnvhlqulnazm51b0dihd942xebn3 All Resources for SAED Evaluation, including DPs captured of standard samples]
* [https://caltech.box.com/s/sz9pai0icsntnef6me23veiwtwdui0gm Troubleshooting Guide]
* [https://caltech.box.com/s/b5h0v6s2ethshh2fs5o4eqwf7pe8sdwc Troubleshooting Guide]
 
===== Manufacturer Resources =====
* Full manufacturer manual is accessible via the UI under the ''Help'' menu
===== Other Online Resources =====
* Rodenburg.org's [http://www.rodenburg.org/guide/index.html Learn to Use a TEM]
 
===== Sample Preparation =====
* Sample preparation is a highly specific task related to each sample type and is therefore primarily the responsibility of the user to carry out.
** KNI staff can teach users how to create lamellae from a bulk specimen using an [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe | SEM/Ga-FIB system]] (see [https://caltech.box.com/s/3l3w507dxwosuya3nbxgk30tdqyp4qy9 SOP] and [https://www.youtube.com/playlist?list=PL7Lb5X_YIzOkg3wRe6A5a5b76fFxYyT3s YouTube playlist])
** The KNI also has a [[TEM Sample Preparation Equipment | TEM sample preparation lab]] that is primarily used to make cross-section samples by traditional methods (i.e. glue together a stack, cut out 3 mm core, thin by polishing, dimple, then final polish with argon mill); inquire with staff for help with these sample preparation tools


===== Video Tutorials =====
===== Order Your Own Grids =====
* [https://youtu.be/UfF_ljwvepQ Getting Started] | [https://youtu.be/luC-5TgNPsQ Basic SEM Alignment]
* Grids used for mounting specimens are considered a personal, consumable item in the KNI. You are required to supply your own grids.
* Astigmatism Correction ([https://youtu.be/YeukVt1Fyi0 Details] | [https://youtu.be/WFfOi-rwlbA On Right-Angle Features] | [https://youtu.be/1syySgnTEqU Stigmator Alignment])
* [https://youtu.be/4V-bE6uqHY4 Eucentric Height: What it means, When to use it & How to get there]
* TEM Lamella Sample Prep ([https://www.youtube.com/playlist?list=PL7Lb5X_YIzOkg3wRe6A5a5b76fFxYyT3s Playlist])
* Cutting & Imaging Cross-sections ([https://www.youtube.com/playlist?list=PL7Lb5X_YIzOnW6dD0GHeasXS6MRVIgoTA Playlist])
* [https://youtu.be/67RdSeJcaGs Milling Non-Conductive Samples using Charge Compensation]
* [https://youtu.be/XNgYe8ZDJvo Perfecting Ga-FIB Alignments]
* [https://youtu.be/R_RYbtumU20 Adjusting TLD Voltage to Capture SE vs. BSE Signal]
===== Graphical Handouts =====
* [https://caltech.box.com/s/14ffgscc39vhrvlyva0jbucsep7j6dvv SEM Concepts]
* [https://caltech.box.com/s/kxaxtslwol1o5a276f3lrqbhss8zvwje Ga-FIB Concepts]
* [https://caltech.box.com/s/k2iy75hxiwkehv0ogqelz2sux9e1cs5k SEM & Ga-FIB Alignments]
* [https://caltech.box.com/s/ijd8gprg9gcavb6of5uegu7osinzsdet Guide to Optimizing SEM Imaging]
===== Presentations =====
* [https://caltech.box.com/s/lulkj0pwm053akyya1shazg8wzgudq9f Scanning Electron Microscopy: Principles, Techniques & Applications]
* [https://caltech.box.com/s/f4k8jan85n5lf6f2tutjx4rkfzjq7y68 Gallium Focused Ion Beam Microscopy: Principles, Techniques & Applications]
===== Manufacturer Manuals =====
* [https://caltech.box.com/s/og4309108q4k2jwhkaxqtpiujg2al5iu Nova NanoLab Operation Manual]
* [https://caltech.box.com/s/j0t3w6i53jhfjcva8i4qvlatdh7t1tzw Gas Injection Systems – Deposition of Platinum (Technical Note)]
* [https://caltech.box.com/s/sm7q7teh5fo5hg3e6flkjbcbycmarrm3 Gas Injection Systems – Deposition of SiOx (Technical Note)]
* [https://caltech.box.com/s/4pcym0l9j1e8t9b2vznrzps9uk7b85mh Gas Injection Systems – Etching with IEE aka XeF2 Etch (Technical Note)]
* [https://caltech.box.com/s/b95pg59k003i9vn8y9elzem0tnxqg3fb Gas Injection Systems – Beam Chemistries Presentation]
* [https://caltech.box.com/s/110tb0o8avjziwa1y4d017dbbcpkxfop Scripting – AutoScript Language Manual (year 2000 Technical Note: most complete)]
* [https://caltech.box.com/s/n0abqy5z1e9a8hbyf38qybxu86sqz3vb Scripting – AutoScript Language Manual (year 2005 Technical Note: less complete, still useful)]
* [https://caltech.box.com/s/tlqgvtkkiahi261megm087i61gqlfzrc Scripting – RunScript Manual]
===== Simulation Software =====
* [http://www.gel.usherbrooke.ca/casino/What.html CASINO Electron Beam Simulation Software – simulate e-beam/specimen interactions]
* [http://www.srim.org/ The Stopping & Range of Ions in Matter (SRIM) – simulate i-beam/specimen interactions]
===== Order Your Own Stubs =====
* Stubs used for mounting specimens are considered a personal, consumable item in the KNI. There are some old stubs at each SEM, yet you should buy your own so that you can keep them clean and available to you. There are many stub geometries and configurations, some of which will be right for you to purchase and keep with your other cleanroom items.
** [https://www.tedpella.com/SEM_html/SEMclip.htm.aspx Buy stubs with copper clips (recommended for most devices, esp with non-conductive substrates)];
** [https://www.tedpella.com/sem_html/SEMpinmount.htm Buy stubs without copper clips (ok for devices with conductive substrates)]


== Specifications ==
== Specifications ==
===== Manufacturer Specifications =====
===== Manufacturer Specifications =====
* [https://caltech.box.com/s/nmws6w7643ne8mraljjar6c4epw0anpp Nova 600 NanoLab Data Sheet] (not all parameters apply to our instrument, see below for details specific to the KNI's Nova 600)
* [https://caltech.box.com/s/e2mw7hh44g2hbcui5m3hnnqnlyunb8lf TF-30 Product Guide & Specifications]
===== SEM Specifications =====
===== TEM & STEM Specifications =====
* 0.5 to 30.0 kV
* From FEI’s (now Thermo Fisher’s) Tecnai G<sup>2</sup> F30 Family
* Apertures: 10 mm, 15 mm, 20 mmm, 30 mm
* Voltage Range: 50-300 kV
* etc.
* Point resolution: 0.20 nm
===== Ga-FIB Specifications =====
* Line resolution: 0.10 nm
* 5.0 to 30.0 kV
* STEM resolution: 0.17 nm
* 10 pA - 20 nA
* Information limit: 0.14 nm
* etc.
* Energy spread: 0.7 eV
* Max alpha-tilt angle with double-tilt holder: ±40&deg;
* Max alpha-tilt angle with tomography holder: ±80&deg;
* Maximum diffraction angle: ±12&deg;
* Camera length: 35–2300 mm
* EDS solid angle: 0.13 srad
<br>
<br>
== Related Instrumentation in the KNI ==
===== Transmission Electron Microscope =====
* [[Tecnai TF-30: 300 kV TEM, STEM, EDS & HAADF | Tecnai TF-30: TEM, STEM, EDS & HAADF (50-300 kV)]]
 
===== Sample Preparation for TEM =====
* [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe]]
* [[TEM Sample Preparation Equipment | TEM Sample Preparation Equipment: Polishing Stations, 3 mm Disk Cutter, Dimpler, Argon Ion Mill]]
===== Scanning Electron Microscopes (SEMs) =====
* [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe]]
* [[Nova 200 NanoLab: SEM, EDS & WDS | Nova 200 NanoLab: SEM, EDS & WDS]]
* [[Sirion: SEM & EDS | Sirion: SEM & EDS]]
* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | Quanta 200F: SEM, ESEM, Lithography & Probe Station]]
===== Focused Ion Beam (FIB) Systems =====
* [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe]]
* [[ORION NanoFab: Helium, Neon & Gallium FIB | ORION NanoFab: Helium, Neon & Gallium FIB]]
===== Sample Preparation for Microscopy =====
* [[Carbon Evaporator | Carbon Evaporator (Leica EM ACE600) to make samples conductive]]
* [[Tergeo Plus ICP- & CCP-RIE: Oxygen & Argon Plasma Cleaner | Oxygen & Argon Plasma Cleaner (Tergeo Plus ICP- & CCP-RIE) to remove hydrocarbons from surface]]

Latest revision as of 05:21, 30 June 2022

Tecnai TF-30
Mouse-Footpad-Peripheral-Nerve-Fiber-3D-Tomography Mark-S-Ladinksy.jpg
Instrument Type Microscopy
Techniques TEM, STEM,
Bright & Dark Field Imaging,
EDS, HAADF,
Electron Diffraction,
Tomography
Staff Manager Annalena Wolff
Staff Email awolff@caltech.edu
Staff Phone 626-395-5994
Reserve time on LabRunr
Request training by email
Sign up for TF-30 email list
Lab Location B242F Keck
Lab Phone 626-395-8908
Manufacturer FEI (now Thermo Fisher)
Model Tecnai TF-30
Tecnai-TF30.jpg

Description

A schematic of the KNI's Tecnai TF-30 TEM/STEM. Modified from an original schematic that is courtesy of Portland State University.

The Tecnai TF-30 is a transmission electron microscope (TEM) that can also be operated in scanning transmission electron microscopy (STEM) mode, with a voltage range of 50 to 300 kV. Operating at 300 kV, the TF-30 has analytical options such as EELS and EFTEM. The TF-30 is also equipped with a high-angle annular dark field (HAADF) detector for use in STEM mode, and an energy dispersive spectroscopy (EDS) detector for compositional analysis (in both TEM mode and, most often, in STEM mode). The Serial EM program allows for automated collection of images at variable tilt angles for performing tomography. See a full list of training and educational resources for this instrument below.

Applications
  • High-Resolution TEM (HRTEM) imaging without an objective aperture
  • Bright Field (BF) & Dark Field (DF) imaging with an objective aperture
  • Selected Area Electron Diffraction (SAED)
  • STEM imaging with a High-Angle Annular Dark Field (HAADF) detector
  • Energy Dispersive Spectroscopy (EDS) with an Oxford INCA system
  • Automatically capture tilt series of images for tomographic imaging

Resources

Equipment Status
SOPs & Troubleshooting
Manufacturer Resources
  • Full manufacturer manual is accessible via the UI under the Help menu
Other Online Resources
Sample Preparation
  • Sample preparation is a highly specific task related to each sample type and is therefore primarily the responsibility of the user to carry out.
    • KNI staff can teach users how to create lamellae from a bulk specimen using an SEM/Ga-FIB system (see SOP and YouTube playlist)
    • The KNI also has a TEM sample preparation lab that is primarily used to make cross-section samples by traditional methods (i.e. glue together a stack, cut out 3 mm core, thin by polishing, dimple, then final polish with argon mill); inquire with staff for help with these sample preparation tools
Order Your Own Grids
  • Grids used for mounting specimens are considered a personal, consumable item in the KNI. You are required to supply your own grids.

Specifications

Manufacturer Specifications
TEM & STEM Specifications
  • From FEI’s (now Thermo Fisher’s) Tecnai G2 F30 Family
  • Voltage Range: 50-300 kV
  • Point resolution: 0.20 nm
  • Line resolution: 0.10 nm
  • STEM resolution: 0.17 nm
  • Information limit: 0.14 nm
  • Energy spread: 0.7 eV
  • Max alpha-tilt angle with double-tilt holder: ±40°
  • Max alpha-tilt angle with tomography holder: ±80°
  • Maximum diffraction angle: ±12°
  • Camera length: 35–2300 mm
  • EDS solid angle: 0.13 srad



Related Instrumentation in the KNI

Transmission Electron Microscope
Sample Preparation for TEM
Scanning Electron Microscopes (SEMs)
Focused Ion Beam (FIB) Systems
Sample Preparation for Microscopy