Tube Furnaces for Wet & Dry Processing: Difference between revisions
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(update primary staff) |
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| Line 7: | Line 7: | ||
|RoomLocation = B235 Steele | |RoomLocation = B235 Steele | ||
|LabPhone = 626-395-1532 | |LabPhone = 626-395-1532 | ||
|PrimaryStaff = [[ | |PrimaryStaff = [[Kelly McKenzie]] | ||
|StaffEmail = | |StaffEmail = kmmckenz@caltech.edu | ||
|StaffPhone = 626-395- | |StaffPhone = 626-395-5732 | ||
|Manufacturer = Tystar Corporation | |Manufacturer = Tystar Corporation | ||
|Model = Tytan Horizontal<br>Diffusion Furnace | |Model = Tytan Horizontal<br>Diffusion Furnace | ||
Revision as of 23:31, 21 September 2021
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Description
The system is designed for processing up to one-hundred, 150 mm (6") wafers per tube. Tube 1 is designated for wet & dry oxidation using a flask evaporator. Tube 2 is designated for dry oxidation and annealing.
Applications
- Dry & Wet oxidation
- Annealing