EBPG 5200: 100 kV Electron Beam Lithography: Difference between revisions
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* [https://caltech.box.com/s/9whswv26y0w6yua8073nw080r3lcfdz4 EBPG Troubleshooting Guide] | * [https://caltech.box.com/s/9whswv26y0w6yua8073nw080r3lcfdz4 EBPG Troubleshooting Guide] | ||
* [https://caltech.box.com/s/cwp88iw2q5t8eygl114zs8ywlhraxo16 EBPG reservation and use policy (Legacy version)] | * [https://caltech.box.com/s/cwp88iw2q5t8eygl114zs8ywlhraxo16 EBPG reservation and use policy (Legacy version)] | ||
===== Training Materials ===== | |||
* [https://caltech.box.com/s/s21wk4nw02qmbugt4z30zjbold5sz41p EBPG Training presentation (Caltech-only access)] | * [https://caltech.box.com/s/s21wk4nw02qmbugt4z30zjbold5sz41p EBPG Training presentation (Caltech-only access)] | ||
* [https://caltech.box.com/s/qkd3gkrmcd3c4ze2xliabt00lhisj5zy EBPG Pre-exposure Walkthrough procedure (video)] | * [https://caltech.box.com/s/qkd3gkrmcd3c4ze2xliabt00lhisj5zy EBPG Pre-exposure Walkthrough procedure (video)] | ||
* [https://caltech.box.com/s/4h37s09pg1lc2khlwjc67z95qlooa6az EBPG System Introduction main room | * [https://caltech.box.com/s/4h37s09pg1lc2khlwjc67z95qlooa6az EBPG System Introduction main room training video] | ||
* [https://caltech.box.com/s/fd9wzhdt2a0qmkgcwerqd27lvi26ca8x EBPG System Introduction service chase overview | * [https://caltech.box.com/s/fd9wzhdt2a0qmkgcwerqd27lvi26ca8x EBPG System Introduction service chase overview training video] | ||
* [https://caltech.box.com/s/ykm83f8maelbqb65140rd6607hayjwa9 EBPG System Introduction UPS and alignment microscopes | * [https://caltech.box.com/s/ykm83f8maelbqb65140rd6607hayjwa9 EBPG System Introduction UPS and alignment microscopes training video] | ||
* [https://caltech.box.com/s/i2q9ow1pkkidt1z7st0czvazobpxours EBPG 5200 sample mounting training video (Caltech-only access)] | |||
===== Sample Prep and Writing SOPs ===== | ===== Sample Prep and Writing SOPs ===== | ||
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* [https://labrunr.caltech.edu/Equipment_2.aspx EBPG Remote Access SOP] (log into ''LabRunr'' and download SOP from EBPG 5200 page) | * [https://labrunr.caltech.edu/Equipment_2.aspx EBPG Remote Access SOP] (log into ''LabRunr'' and download SOP from EBPG 5200 page) | ||
===== Troubleshooting SOPs ===== | ===== Advanced Troubleshooting SOPs ===== | ||
* [https://caltech.box.com/s/55zji9vfs8kuxl0aye1sw1iy8xi0rd9c Information Archive Beam] | * [https://caltech.box.com/s/55zji9vfs8kuxl0aye1sw1iy8xi0rd9c Information Archive Beam] | ||
* [https://caltech.box.com/s/qnl5l52v936kql830kt0fyrmlaj8cbmo BEAMS $pg shutdown / coldstart SOP] | * [https://caltech.box.com/s/qnl5l52v936kql830kt0fyrmlaj8cbmo BEAMS $pg shutdown / coldstart SOP] | ||
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* [https://caltech.box.com/s/emfc1i4qeg9psatj6enpm9g38f5a2u9r EBPG FEG recovery and new beam table SOP] | * [https://caltech.box.com/s/emfc1i4qeg9psatj6enpm9g38f5a2u9r EBPG FEG recovery and new beam table SOP] | ||
* [https://caltech.box.com/s/oxjf52qwvj0ocnx151aqd6tso8ykfkca Raith Common errors and solutions with aligned writing SOP] | * [https://caltech.box.com/s/oxjf52qwvj0ocnx151aqd6tso8ykfkca Raith Common errors and solutions with aligned writing SOP] | ||
* [https://caltech.box.com/s/3lt47igh9wcza5ck9nl3i4ansn1jy4q7 EBPG 5200 troubleshooting loader issues training video (Caltech-only access)] | |||
===== Data Preparation Resources ===== | ===== Data Preparation Resources ===== | ||
Revision as of 21:20, 18 August 2020
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Description
The Raith EBPG 5200 is a dedicated direct-write Electron Beam Pattern Generator that is used to pattern large areas by high-resolution electron beam lithography. This instrument has substrate holders to handle 3" wafers, piece parts from a couple of mm to 3" diameter and up to 6.35 mm thick, and 6" mask plates. This instrument can be outfitted with substrate holders to handle up to 200 mm wafers. While this instrument can be set to operate at 20, 50, or 100 keV, it is normally set for 100 keV operation (i.e. with an accelerating voltage of 100 kV, the average energy per electron is 100 keV).
Operational Applications
- Non-aligned electron beam lithography
- Aligned (aka direct-write) electron beam lithography
Scientific / Technical Applications
- Nanophotonics
- Nano-optics
- Waveguides
Resources
Equipment Data
General SOPs
- EBPG reservation and use policy (COVID-19 Phase 2 Updates)
- EBPG SOP
- User's Guide to the EBPG pg computer desktop
- EBPG Troubleshooting Guide
- EBPG reservation and use policy (Legacy version)
Training Materials
- EBPG Training presentation (Caltech-only access)
- EBPG Pre-exposure Walkthrough procedure (video)
- EBPG System Introduction main room training video
- EBPG System Introduction service chase overview training video
- EBPG System Introduction UPS and alignment microscopes training video
- EBPG 5200 sample mounting training video (Caltech-only access)
Sample Prep and Writing SOPs
- EBPG High Resolution Mode SOP
- EBPG 5200 Piece part prep SOP
- EBPG Preparing sample for exposure SOP
- EBPG Beam Adjustment SOP
- EBPG Adjust Aperture SOP
- EBPG Marker definition Procedure
- EBPG JOY Marker Procedure
- EBPG Disable marker height check SOP
- EBPG 5200 Secondary Electron Detector SOP
- EBPG Holderfix SOP
- EBPG Remote Access SOP (log into LabRunr and download SOP from EBPG 5200 page)
Advanced Troubleshooting SOPs
- Information Archive Beam
- BEAMS $pg shutdown / coldstart SOP
- Beam file Recovery SOP
- Lindgren MACS SOP
- EBPG Emergency air cylinder SOP
- EBPG Unlocking the stage SOP
- EBPG SAEHT not initialized SOP
- EBPG SAEHT no route to host recovery SOP
- EBPG hotbox slave communications fault recovery SOP
- EBPG FEG recovery and new beam table SOP
- Raith Common errors and solutions with aligned writing SOP
- EBPG 5200 troubleshooting loader issues training video (Caltech-only access)
Data Preparation Resources
- SOP: KNI Introduction to Layout BEAMER
- App Note: 3D Surface Proximity Effect Correction
- App Note: Fracture Optimization
- App Note: Writing Time Optimization
- App Note: Formulas in Beamer Modules
- App Note: Multipass
- App Note: Mixed Export Options
- App Note: GPF Formatter
- March 2020 Genisys BEAMeeting at Caltech
- June 2020 Genisys BEAMeeting Layout Beamer training video
Lithography Process Information
- Bi-Layer PMMA Resist Spinning Recipe
- MAN Resist Data Sheet
- PMMA Resist Data Sheet
- SML Resist Data Sheet
- ZEP Resist Data Sheet
- ZEP 520A Resist: Procedure for spinning, writing & development (Caltech-only access)
- HSQ Resist: Procedure for spinning, writing & development (Caltech-only access)
- Supramolecular Resist processing (Caltech-only access)
- Laurell Spinner cleaning SOP
Manufacturer Manuals
- EBPG 5200 system manual (Caltech-only access)
- Raith cjob manual (Caltech-only access)
- Layout Beamer Release Notes
- Layout Beamer Manual
- Laurell Spin Coater Manual (log into LabRunr and download Manual from EBPG 5000+ page)
Specifications
- Voltage Range: 20, 50 or 100 kV
- Current Range: 50 pA to 200 nA
- Main Field Size: Up to 1 mm x 1 mm
- Main Field Resolution: 20 bit
- Maximum Writing Frequency: 100 MHz
- Aperture Sizes: 200 μm, 300 μm, 400 μm
Related Instrumentation in the KNI
Electron Beam Lithography
- EBPG 5200: 100 kV Electron Beam Lithography
- EBPG 5000+: 100 kV Electron Beam Lithography
- Quanta 200F: SEM with 1-30 kV Electron Beam Lithography
- Tecnai TF-20: TEM & STEM with 80-200 kV Electron Beam Lithography