XeF2 Etcher for Silicon

XeF2 Silicon Etcher Instrument Type Etching Techniques Selective dry Si etching Staff Manager Alex Wertheim Staff Email alexw@caltech.edu Staff Phone 626-395-3371 Reserve time on LabRunr Request training by email Lab Location Lab Phone 626-395-1539 Manufacturer N/A Model N/A

Description

The XeF₂ etcher flows pressure and time controlled pulses of XeF₂ gas into a chamber to deliver an isotropic etch which is highly selective only to Silicon. It is commonly used to remove Si under layers accessed through Vias to suspend membranes and other structures in MEMS devices.

Applications

• Very high selectivity dry Si etching
• MEMS fabrication

Resources

SOPs

• KNI SOP