Difference between revisions of "Wet Chemistry"

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|Model = NA
|Model = NA
|Techniques = Wet Chemical Processing:<br>Acids, Bases, Solvents,<br>and Electroplating
|Techniques = Wet Chemical Processing:<br>Acids, Bases, Solvents,<br>and Electroplating
|EmailList = kni-chemistry@caltech.edu
|EmailList = kni-chemistry
|EmailListName =  Chemistry
|EmailListName =  Chemistry
}}
}}
== Facilities and Chemicals ==
==Facilities==
===== Available Benches =====
* Acids
* Hydrofluoric Acid (HF)
* Bases
* Potassium Hydroxide (KOH)
* Solvents
* Electroplating
===== Chemicals Provided by the KNI with typical SDS=====
* [https://caltech.box.com/s/e9aenw9ddp2mubkvqkxqd3mtfohp7xz1 Acetic Acid Glacial]
* [https://caltech.box.com/s/3zz1ugq1qgtwmc29o54313sy8u7an9hd Acetone]
* [https://caltech.box.com/s/a8n0s5au2cucnsfqlwh2wctml3imigwb Aluminum Etchant Type A]
* Aluminum Etchant D
* [https://caltech.box.com/s/qi5n4uow7kq9aq04y1z3glb4jnzsjr89 Ammonium Hydroxide (NH<sub>4</sub>OH)]
* Au Etchant
* [https://caltech.box.com/s/oet38b107t13e5eyua3p5u40imggnqqs AZ 400K Photoresist Developer]
* [https://caltech.box.com/s/xsouakt5afpirwsj2t2otve9bqo6nkzx AZ 726 MIF Developer]
* AZ 4620
* [https://caltech.box.com/s/lsa4wk6vktuuh4itqzv9r3k0yql38dwi AZ 5214-E Photoresist]
* [https://caltech.box.com/s/fl0p67vj2gtucz6896taed5wu9thdoeo Buffered HF Improved]
* [https://caltech.box.com/s/nbbptm14e4ejc5kc9bjm8x0aa074pnla CD 26 Developer]
* [https://caltech.box.com/s/ejr2qph7nits1eaelm1f21s1oowrou0d Chromium Etchant CR-7S]
* Citric Acid
* Copper Etchant
* [https://caltech.box.com/s/y2o9z1zt1kor0we7erdkfyruxgyp82h7 Hexamethyldisilizane (HMDS)]
* [https://caltech.box.com/s/m1icrzidd6tw2ql7zke5p9v3mq2fx0br Hydrochloric Acid]
* Hydrofluoric Acid (HF)
* [https://caltech.box.com/s/jg1y0btpel4fpylh7vonld9gykvp6plg Hydrogen Peroxide, 30% H<sub>2</sub>O<sub>2</sub>]
* [https://caltech.box.com/s/7c02l4sctvfx0wplr4k6429yi0j8ew5q Isopropyl Alcohol (IPA)]
* [https://caltech.box.com/s/mk4rilpjcbd5ryjb1tw764eau62mjq7f Methanol]
* [https://caltech.box.com/s/tf1ty82wcbf68l7gekqsna3ajuiljhkw Methyl Isobutyl Ketone (MIBK, 4-Methyl-2-pentanone)]
* [https://caltech.box.com/s/fip81rmqz0x1pw031zqg7blun11617mv Methylene Chlorine (Dichloromethane)]
* [https://caltech.box.com/s/w1fp48vpymlru0675o28tuugig7bmevv MF 319 Developer]
* [https://caltech.box.com/s/mewj3293pbgyjj3zxupoj0uo9i4hv0c7 Nano-strip and Nanostrip 2x]
* [https://caltech.box.com/s/kqdon6279rxtna894s6qzgah7xn3p0ld Remover PG, Photoresist Remover (N-Methyl-2-Pyrrolidone)]
* PGMEA
* [https://caltech.box.com/s/44slar2g3q5cbe9vrpg5tq7viwq1v6vm Phosphoric Acid (H<sub>3</sub>PO<sub>4</sub>)]
* [https://caltech.box.com/s/41wp3geih92ydmu1jrv5f4spms6j1utg Potassium Hydroxide]
* [https://caltech.box.com/s/avqs14mt28i1epom0n6w37p55rjqvkbe SU-8 Developer] (Micro-Chem)
* [https://caltech.box.com/s/89j0lgduzv1hqnewgfr5rrkigxcpw5b3 Sulfuric Acid (H<sub>2</sub>SO<sub>4</sub>)]
* [https://caltech.box.com/s/9ht2pznbmygzrau5bgp4yuom65h3wk4u Titanium Etchant TFT]
* [https://caltech.box.com/s/976lv8b4ka4oupr7nkfb8g1pill79usn Tetramethylammonium Hydroxide 25% (TMAH)]


===== Approved Chemicals =====
'''Wet Benches in the Wet Chemistry Room:'''
* [[Material Safety Data Sheets (MSDS)#Liquids | See List]]


== Resources ==
*ACID BENCH: Personal Protective Equipment required to be worn.
===== Safety Data Sheets (SDS) =====
**Okay to store acid resistant gloves on top
* [[Safety Data Sheets (SDS) | See all SDS]]
*BASE/CAUSTIC BENCH: Personal Protective Equipment required to be worn.
**Okay to store acid resistant gloves on top
*ELECTROPLATING BENCH:  Personal Protective Equipment required to be worn.
*HF ACID BENCH (Hydrofluoric Acid): Personal Protective Equipment required to be worn.
**Okay to store acid resistant gloves on top
*KOH BENCH (Potassium Hydroxide): Personal Protective Equipment required to be worn.
*SOLVENTS BENCH:  Double Nitrile Gloves and Safety Glasses required to be worn.
 
'''------>  Note:  Personal Protective Equipment or "PPE" consists of:'''
*1)  Acid Resistant Apron (Green) - PUT ON FIRST, Remove Last
*2)  Face Shield  (WITH SAFETY GLASSES) - PUT ON SECOND, Remove Second
*3)  Trionic E-194 Tripoly Acid Resistant Gloves - PUT ON LAST, Remove First
Write NAME and DATE on both Trionic gloves when opening package.  Acid gloves typically last 2 weeks.  INSPECT BEFORE EACH USE.
 
 
'''Wet Bench in the Optical Lithography Room:'''
*DEVELOP BENCH (base/caustic):  Double Nitrile Gloves and Safety Glasses required to be worn. 
**Solvent Develop (SU8 developer) must be performed on the SOLVENT BENCH in the Wet Chemistry Room.
'''Fumed Hoods inside the Optical Lithography Room:'''
*SPINNER BENCH (solvent hood): Laurell 1 (SU8 only), Laurell 2 (Positive,nLOF SPR), and Headway Spinner (Large Substrates and special Coatings)
*HOT PLATE BENCH (solvent hood):  Torrey Pines Scientific hot plate(programable up to 350C), Two - Fairweather TPS88 hot plates(Non-Programable up to 150C) Solvent Hood.
 
'''Wet Bench in the E-beam Lithography Area:'''
*DEVELOP and SPINNER BENCH (solvent bench):  Double Nitrile Gloves and Safety Glasses required to be worn.
'''Hazardous Waste Storage:'''
*AUTOMATIC BOTTLE WASHER:  Located inside the Wet Chemistry Room
*SATELLITE ACCUMULATION AREA:  Located in the Oxford Chase next to the Water Chiller. 
**STORAGE CART for storage of TAGGED full waste bottles.
**STORAGE BIN (next to the cart) is for "DOUBLE BAGGED AND TAGGED" waste which can also be used for TAGGED containers that do not fit inside the cart.
 
== Chemistry Procedures and Safety ==
 
* [[Wet Chemistry Safety | Wet Chemistry Safety Procedures]] - Requesting new chemical, PPE Overview, Hazardous Waste Handling and Labeling, Decanting Chemicals, Hot Plate Rules, Buddy System, Secondary Containment and Other Best Practices.
* [[Wet Chemistry Resources | Wet Chemistry Resources Page]] - Contains fabrication recipes and procedures
* [[Lab_Rules_&_Safety | Lab Rules & Safety]]  - KNI cleanroom safety handbook
 
== Chemical Safety Data Sheet Lists ==
 
* '''[[Provided_Chemicals | Chemicals Provided by the KNI with typical SDS]]'''
* '''[[Safety Data Sheets (SDS) | Approved Chemicals Allowed to be used in the KNI with typical SDS (chemical not provided by the KNI)]]'''
* [https://www.chemicalsafety.com/sds-search Search for Safety Data Sheets (SDS)] - New Chemical Search (Web Search)
 
==Requesting New Chemicals==
===NEVER bring in any chemicals into the KNI Lab before receiving an approval through email that your chemical has been allowed to be used inside the lab.===
*Always thoroughly review the SAFETY DATA SHEET of the new chemical being requested BEFORE submitting a request.
*Submit the request through email to the KNI Lab Safety Officer - [mailto:bertm@caltech.edu Bert Mendoza]
*Email should include: 
**(1) SAFETY DATA SHEET (attached) from manufacture.
**(2) PROCESS DESCRIPTION - a detailed description of the process and how the chemical will be used.
**(3) AMOUNT OR QUANTITY of chemical to be brought into the KNI Lab.
*The KNI Lab provides many chemicals for processing.  If the requested chemical will improve your process and can be valuable to other members, include the reasons in the request.  Staff may decide it would be beneficial to provide the new chemical for all members and add it to the '''[[Provided_Chemicals | Chemicals Provided by the KNI with typical SDS]]''' list.
*If the chemical is unique to your process, you will be required to supply the chemical and the chemical will be added to the'''[[Safety Data Sheets (SDS) | Approved Chemicals with typical SDS]]''' list.

Latest revision as of 15:42, 2 August 2022

Wet Chemistry
Wet-Chemistry Solvents-and-HF.jpg
Instrument Type Wet Chemistry
Techniques Wet Chemical Processing:
Acids, Bases, Solvents,
and Electroplating
Staff Manager Bert Mendoza
Staff Email bertm@caltech.edu
Staff Phone 626-395-4075
Reserve time on LabRunr
Request training by email
Sign up for Chemistry email list
Lab Location B211 Steele
Lab Phone 626-395-1538
Manufacturer NA
Model NA

Facilities

Wet Benches in the Wet Chemistry Room:

  • ACID BENCH: Personal Protective Equipment required to be worn.
    • Okay to store acid resistant gloves on top
  • BASE/CAUSTIC BENCH: Personal Protective Equipment required to be worn.
    • Okay to store acid resistant gloves on top
  • ELECTROPLATING BENCH: Personal Protective Equipment required to be worn.
  • HF ACID BENCH (Hydrofluoric Acid): Personal Protective Equipment required to be worn.
    • Okay to store acid resistant gloves on top
  • KOH BENCH (Potassium Hydroxide): Personal Protective Equipment required to be worn.
  • SOLVENTS BENCH: Double Nitrile Gloves and Safety Glasses required to be worn.

------> Note: Personal Protective Equipment or "PPE" consists of:

  • 1) Acid Resistant Apron (Green) - PUT ON FIRST, Remove Last
  • 2) Face Shield (WITH SAFETY GLASSES) - PUT ON SECOND, Remove Second
  • 3) Trionic E-194 Tripoly Acid Resistant Gloves - PUT ON LAST, Remove First

Write NAME and DATE on both Trionic gloves when opening package. Acid gloves typically last 2 weeks. INSPECT BEFORE EACH USE.


Wet Bench in the Optical Lithography Room:

  • DEVELOP BENCH (base/caustic): Double Nitrile Gloves and Safety Glasses required to be worn.
    • Solvent Develop (SU8 developer) must be performed on the SOLVENT BENCH in the Wet Chemistry Room.

Fumed Hoods inside the Optical Lithography Room:

  • SPINNER BENCH (solvent hood): Laurell 1 (SU8 only), Laurell 2 (Positive,nLOF SPR), and Headway Spinner (Large Substrates and special Coatings)
  • HOT PLATE BENCH (solvent hood): Torrey Pines Scientific hot plate(programable up to 350C), Two - Fairweather TPS88 hot plates(Non-Programable up to 150C) Solvent Hood.

Wet Bench in the E-beam Lithography Area:

  • DEVELOP and SPINNER BENCH (solvent bench): Double Nitrile Gloves and Safety Glasses required to be worn.

Hazardous Waste Storage:

  • AUTOMATIC BOTTLE WASHER: Located inside the Wet Chemistry Room
  • SATELLITE ACCUMULATION AREA: Located in the Oxford Chase next to the Water Chiller.
    • STORAGE CART for storage of TAGGED full waste bottles.
    • STORAGE BIN (next to the cart) is for "DOUBLE BAGGED AND TAGGED" waste which can also be used for TAGGED containers that do not fit inside the cart.

Chemistry Procedures and Safety

Chemical Safety Data Sheet Lists

Requesting New Chemicals

NEVER bring in any chemicals into the KNI Lab before receiving an approval through email that your chemical has been allowed to be used inside the lab.

  • Always thoroughly review the SAFETY DATA SHEET of the new chemical being requested BEFORE submitting a request.
  • Submit the request through email to the KNI Lab Safety Officer - Bert Mendoza
  • Email should include:
    • (1) SAFETY DATA SHEET (attached) from manufacture.
    • (2) PROCESS DESCRIPTION - a detailed description of the process and how the chemical will be used.
    • (3) AMOUNT OR QUANTITY of chemical to be brought into the KNI Lab.
  • The KNI Lab provides many chemicals for processing. If the requested chemical will improve your process and can be valuable to other members, include the reasons in the request. Staff may decide it would be beneficial to provide the new chemical for all members and add it to the Chemicals Provided by the KNI with typical SDS list.
  • If the chemical is unique to your process, you will be required to supply the chemical and the chemical will be added to the Approved Chemicals with typical SDS list.