Wafer Bonder

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Suss Microtec SB6L Wafer Bonder
Wafer-Bonder Suss-SB6L.jpg
Instrument Type Support Tools
Techniques Pressure/Heat bonding
Staff Manager Alex Wertheim
Staff Email alexw@caltech.edu
Staff Phone 626-395-3371
Reserve time on LabRunr
Request training by email
Lab Location
Lab Phone 626-395-1539
Manufacturer Suss Microtec
Model SBL6


The SB6L wafer bonder applies force and heat to the back side of two wafers in a vacuum chamber to bond them face to face. An automatic recipe can be created with control over bonding pressure, temperature, and chamber pressure as well as ramp/duration of any process step. Since heat and temperature can be controlled separately, temperature sensitive materials such as polymers may be bonded.

  • MEMS & Microelectronics fabrication


SOPs & Troubleshooting
Manufacturer Manuals


Notable Specifications