Wafer Bonder

From the KNI Lab at Caltech
Revision as of 20:13, 17 May 2019 by Alexw (talk | contribs) (Created page with "{{InstrumentInfobox| |InstrumentName = Suss Microtec SB6L Wafer Bonder |HeaderColor = #F5A81C |ImageOne = |ImageTwo = |InstrumentType = Equipment_List#Support Tools|Suppor...")
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to navigation Jump to search
Suss Microtec SB6L Wafer Bonder
[[image:|320px|center|]]
Instrument Type Support Tools
Techniques Pressure/Heat bonding
Staff Manager Alex Wertheim
Staff Email alexw@caltech.edu
Staff Phone 626-395-3371
Reserve time on LabRunr
Request training by email
Sign up for kni-sb6l email list
Lab Location
Lab Phone 626-395-1539
Manufacturer Suss Microtec
Model {{{Model}}}
[[image:|320px|center|]]

Description

The SB6L wafer bonder applies force and heat to the back side of two wafers in a vacuum chamber to bond them face to face. An automatic recipe can be created with control over bonding pressure, temperature, and chamber pressure as well as ramp/duration of any process step. Since heat and temperature can be controlled separately, temperature sensitive materials such as polymers may be bonded.

Applications
  • MEMS & Microelectronics fabrication