Wafer Bonder: Difference between revisions
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{{InstrumentInfoboxOneImage| | {{InstrumentInfoboxOneImage| | ||
|InstrumentName = | |InstrumentName = Wafer Bonder | ||
|HeaderColor = #E6E7E8 | |HeaderColor = #E6E7E8 | ||
|ImageOne = Wafer-Bonder_Suss-SB6L.jpg | |ImageOne = Wafer-Bonder_Suss-SB6L.jpg | ||
|ImageTwo = | |ImageTwo = | ||
|InstrumentType = [[Equipment_List#Support Tools| | |InstrumentType = [[Equipment_List#Support_Tools|Support Tools]],<br>[[Equipment_List#Substrate_Processing|Substrate Processing]] | ||
|RoomLocation = | |RoomLocation = B217 Steele | ||
|LabPhone = 626-395-1539 | |LabPhone = 626-395-1539 | ||
|PrimaryStaff = [[Alex Wertheim]] | |PrimaryStaff = [[Alex Wertheim]] | ||
| Line 12: | Line 12: | ||
|Manufacturer = Suss Microtec | |Manufacturer = Suss Microtec | ||
|Model = SBL6 | |Model = SBL6 | ||
|Techniques = Pressure/Heat | |Techniques = Pressure/Heat Bonding | ||
|RequestTraining = alexw@caltech.edu | |RequestTraining = alexw@caltech.edu | ||
|EmailList = kni-sb6l | |EmailList = kni-sb6l | ||
| Line 18: | Line 18: | ||
}} | }} | ||
== Description == | == Description == | ||
The SB6L wafer bonder applies force and heat to the back side of two wafers in a vacuum chamber to bond them face to face. An automatic recipe can be created with control over bonding pressure, temperature, and chamber pressure as well as ramp | The SB6L wafer bonder applies force and heat to the back side of two wafers in a vacuum chamber in order to bond them face to face. An automatic recipe can be created with control over bonding pressure, temperature, and chamber pressure as well as ramp & duration of any process step. Since heat and temperature can be controlled separately, temperature-sensitive materials such as polymers may be bonded. | ||
===== Applications ===== | |||
* MEMS & Microelectronics Fabrication | |||
===== | == Resources == | ||
* | ===== SOPs ===== | ||
* [https://caltech.box.com/s/jwm9iw0t64s7sznmzwjs32zjdjownts7 KNI SOP] | |||
===== Manufacturer Manuals ===== | |||
* [https://caltech.box.com/s/7pj89gepa98exkv7gyy3hmzs0gv3jo72 Process Manual] | |||
Revision as of 22:06, 28 May 2019
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Description
The SB6L wafer bonder applies force and heat to the back side of two wafers in a vacuum chamber in order to bond them face to face. An automatic recipe can be created with control over bonding pressure, temperature, and chamber pressure as well as ramp & duration of any process step. Since heat and temperature can be controlled separately, temperature-sensitive materials such as polymers may be bonded.
Applications
- MEMS & Microelectronics Fabrication