Tube Furnaces for Wet & Dry Processing

Tystar Tytan Tube Furnaces 1 & 2 Instrument Type Support Tools, Thermal Processing Techniques Oxidation, Annealing Staff Manager Nathan S. Lee Staff Email nathslee@caltech.edu Staff Phone 626-395-1319 Reserve time on LabRunr Request training by email Lab Location B235 Steele Lab Phone 626-395-1532 Manufacturer Tystar Corporation Model Tytan Horizontal Diffusion Furnace

Description

The system is designed for processing up to one-hundred, 150 mm (6") wafers per tube. Tube 1 is designated for wet & dry oxidation using a flask evaporator. Tube 2 is designated for dry oxidation and annealing.

Applications

• Dry & Wet oxidation
• Annealing

Resources

SOPs & Troubleshooting

• KNI SOP (Coming Soon)