Difference between revisions of "Tube Furnaces for Wet & Dry Processing"

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|ImageOne = Tystar-Tytan-Tube-Furnaces.jpg
|ImageOne = Tystar-Tytan-Tube-Furnaces.jpg
|ImageTwo =  
|ImageTwo =  
|InstrumentType = [[Equipment_List#Thermal_Processing|Thermal Processing]]
|InstrumentType = [[Equipment_List#Suppotr_Tools|Support Tools]],<br>[[Equipment_List#Thermal_Processing|Thermal Processing]]
|RoomLocation = B235 Steele
|RoomLocation = B235 Steele
|LabPhone = 626-395-1532
|LabPhone = 626-395-1532

Revision as of 21:49, 27 May 2019

Tystar Tytan Tube Furnaces 1 & 2
Instrument Type Support Tools,
Thermal Processing
Techniques Oxidation, Annealing
Staff Manager Nathan S. Lee
Staff Email nathslee@caltech.edu
Staff Phone 626-395-1319
Reserve time on LabRunr
Request training by email
Sign up for Tystar email list
Lab Location B235 Steele
Lab Phone 626-395-1532
Manufacturer Tystar Corporation
Model Tytan Horizontal
Diffusion Furnace


The system is designed for processing up to one-hundred, 150 mm (6") wafers per tube. Tube 1 is designated for wet & dry oxidation using a flask evaporator. Tube 2 is designated for dry oxidation and annealing.

  • Dry & Wet oxidation
  • Annealing


SOPs & Troubleshooting