Equipment List

From the KNI Lab at Caltech
Jump to navigation Jump to search


Electron Beam Lithography
Ion Beam Lithography
Optical Lithography


Chemical Vapor Deposition (CVD)
Dielectric Packaging / Moisture Barrier


Dry Etching
Wet Etching


Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)
  • TEM/STEM/EDS/HAADF: Thermo Fisher Tecnai TF-30 (80-300 kV)
  • TEM/STEM/EDS/EELS/EFTEM/NPGS: Thermo Fisher Tecnai TF-20 (80-200 kV)
Scanning Probe Microscopes
  • Atomic Force Microscope (AFM): Bruker Dimension ICON
  • Profilometer: Veeco Dektak 3ST
Optical Characterization
  • Spectroscopic Ellipsometry: Woolam M-2000
  • Light Microscope: Olympus BX51M with Filmetrics model F40
  • Fluorescence Microscope: Olympus IX81

Support Tools

Thermal Processing
  • Tube Furnaces: Tystar Tytan 1 & 2 (Wet & Dry Oxidation and Annealing)
  • Rapid Thermal Processing: Modular Process Technology RTP-600S
  • Rapid Thermal Annealer: Jipelec Jetfirst 150
Substrate Processing
  • Scriber-Breaker: Dynatex GST-150
  • Wafer Bonder: Suss MicroTec model SB6L
  • Critical Point Dryer: Tousimis Automegasamdri 915B
Device Processing
  • Wedge-Wedge Wire Bonder: Westbond model 7476D-79
  • Electrical Probing Station: Cascade Microtech M150