Dektak 3ST: Profilometer

From the KNI Lab at Caltech
Revision as of 21:54, 20 February 2020 by Jpalmer (talk | contribs)
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to navigation Jump to search
Veeco Dektak 3ST Profilometer
Dektak-3ST-Profilometer.jpg
Instrument Type Metrology
Techniques Surface Profiling
Staff Manager Alex Wertheim
Staff Email alexw@caltech.edu
Staff Phone 626-395-3371
Reserve time on LabRunr
Request training by email
Sign up for Metrology email list
Lab Location B235 Steele
Lab Phone 626-395-1539
Manufacturer Veeco
Model Dektak 3ST

Description

The Dektak 3ST profilometer is a stylus-type surface profiler. It is equipped with a camera for locating the region of interest, manual sample manipulation & tilt correction, and profile analysis software. It can be used to get a rough idea of the topography of features by scanning a single line across the surface. Features as small as 100 nm in height can be determined with some approximation.

Applications
  • Surface Profiling

Resources

SOPs



Related Instrumentation in the KNI

Scanning Probe Microscopes