Dektak 3ST: Profilometer

Veeco Dektak 3ST Profilometer Instrument Type Metrology Techniques Surface Profiling Staff Manager Alex Wertheim Staff Email alexw@caltech.edu Staff Phone 626-395-3371 Reserve time on LabRunr Request training by email Lab Location B235 Steele Lab Phone 626-395-1539 Manufacturer Veeco Model Dektak 3ST

Description

The Dektak 3ST profilometer is a stylus-type surface profiler. It is equipped with a camera for locating the region of interest, manual sample manipulation & tilt correction, and profile analysis software. It can be used to get a rough idea of the topography of features by scanning a single line across the surface. Features as small as 100 nm in height can be determined with some approximation.

Applications

• Surface Profiling

Resources

SOPs

• KNI SOP

Related Instrumentation in the KNI

Scanning Probe Microscopes

• Dimension Icon: Atomic Force Microscope (AFM)
• Dektak 3ST: Profilometer