Difference between revisions of "Dektak 3ST: Profilometer"

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|Techniques = Surface Profiling
|Techniques = Surface Profiling
|RequestTraining = alexw@caltech.edu
|RequestTraining = alexw@caltech.edu
|EmailList = kni-metrology@caltech.edu
|EmailList = kni-metrology
|EmailListName = Metrology
|EmailListName = Metrology

Latest revision as of 21:54, 20 February 2020

Veeco Dektak 3ST Profilometer
Instrument Type Metrology
Techniques Surface Profiling
Staff Manager Alex Wertheim
Staff Email alexw@caltech.edu
Staff Phone 626-395-3371
Reserve time on LabRunr
Request training by email
Sign up for Metrology email list
Lab Location B235 Steele
Lab Phone 626-395-1539
Manufacturer Veeco
Model Dektak 3ST


The Dektak 3ST profilometer is a stylus-type surface profiler. It is equipped with a camera for locating the region of interest, manual sample manipulation & tilt correction, and profile analysis software. It can be used to get a rough idea of the topography of features by scanning a single line across the surface. Features as small as 100 nm in height can be determined with some approximation.

  • Surface Profiling



Related Instrumentation in the KNI

Scanning Probe Microscopes