Dektak 3ST: Profilometer: Difference between revisions
Jump to navigation
Jump to search
No edit summary |
No edit summary |
||
| (One intermediate revision by one other user not shown) | |||
| Line 14: | Line 14: | ||
|Techniques = Surface Profiling | |Techniques = Surface Profiling | ||
|RequestTraining = alexw@caltech.edu | |RequestTraining = alexw@caltech.edu | ||
|EmailList = kni-metrology | |EmailList = kni-metrology | ||
|EmailListName = Metrology | |EmailListName = Metrology | ||
}} | }} | ||
| Line 26: | Line 26: | ||
===== SOPs ===== | ===== SOPs ===== | ||
* [https://caltech.box.com/s/hdic8scc882tkrcjqsbaruqph9jgo75t KNI SOP] | * [https://caltech.box.com/s/hdic8scc882tkrcjqsbaruqph9jgo75t KNI SOP] | ||
<br> | |||
<br> | |||
== Related Instrumentation in the KNI == | == Related Instrumentation in the KNI == | ||
===== Scanning Probe Microscopes ===== | ===== Scanning Probe Microscopes ===== | ||
* [[Dimension Icon: Atomic Force Microscope (AFM) | Dimension Icon: Atomic Force Microscope (AFM)]] | * [[Dimension Icon: Atomic Force Microscope (AFM) | Dimension Icon: Atomic Force Microscope (AFM)]] | ||
* [[Dektak 3ST: Profilometer | Dektak 3ST: Profilometer]] | * [[Dektak 3ST: Profilometer | Dektak 3ST: Profilometer]] | ||
Revision as of 21:54, 20 February 2020
|
Description
The Dektak 3ST profilometer is a stylus-type surface profiler. It is equipped with a camera for locating the region of interest, manual sample manipulation & tilt correction, and profile analysis software. It can be used to get a rough idea of the topography of features by scanning a single line across the surface. Features as small as 100 nm in height can be determined with some approximation.
Applications
- Surface Profiling
Resources
SOPs