CHA: Electron Beam Evaporator

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CHA Mk40 Evaporator
Instrument Type Deposition
Techniques E-beam evaporation
Staff Manager Alex Wertheim
Staff Email alexw@caltech.edu
Staff Phone 626-395-3371
Reserve time on LabRunr
Request training by email
Sign up for E-beam Evaporator email list
Lab Location B123 Steele
Lab Phone 626-395-1539
Manufacturer CHA Industries
Model {{{Model}}}

Description

The CHA Mark 40 electron beam evaporator is a cryopumped six-pocket electron beam deposition system that is optimized for processing multiple wafers with a planetary substrate holder configuration. This tool offers precise control of electron beam evaporation processes for metal films.

Applications
  • Metal & Oxide deposition
  • Lift-off
  • Etch hard-mask formation

Resources

SOPs & Troubleshooting
Video Tutorials

Specifications

Hardware Specifications
  • Typical base pressure: 1E-6 to 1E-7 Torr
  • All dry pumping system (cryo + dry mechanical pump)
  • Evaporation Source: 1x single emitter, 6-pocket e-beam evaporation source