Parylene Coater

Parylene Coater Instrument Type Deposition Techniques Parylene Deposition Staff Manager Nathan S. Lee Staff Email nathslee@caltech.edu Staff Phone 626-395-4386 Reserve time on FBS Request training via FBS User Dashboard Lab Location B203 Steele Lab Phone 626-395-1539 Manufacturer Para Tech Model LabTop 3000

Description

The ParaTech LabTop 3000 Parylene coater uses a multi-stage thermal process to deposit a conformal parylene film on your substrates. Multiple wafers up to 150 mm diameter may be coated at once. Samples are under vacuum during and not subject to heat during coating.

Applications

• Bio-compatible/moisture protection packaging
• Dielectric polymer coating

Resources

SOPs

• KNI SOP