Digital Microscope Keyence VHX7000

Suss Contact Mask Aligner MA6/BA6 Instrument Type Lithography Techniques Frontside Alignment, Backside Alignment, Flood exposure Staff Manager Alireza Ghaffari Staff Email alireza@caltech.edu Staff Phone 626-395-3984 Reserve time on FBS Request training via FBS User Dashboard Lab Location B217 Steele Lab Phone 626-395-1535 Manufacturer Suss MicroTec Model MA6 & MA6/BA6

Description

Suss MicroTec model MA6 Mask Aligner (model MA6/BA6 is shown at the top of the infobox)

The Keyence VHX Series 4K Digital Microscope uses high-resolution 4K imaging and advanced analysis software for high-magnification imaging, 2D/3D measurements, and more. The VHX Series has a depth of field that is 20 times greater than conventional optical microscopes. 2D and 3D measurements for roughness, contamination, grain size, and other measurements can be performed. The digital images can be saved in their original form or with measurements applied.

Objectives Available

• Low Magnification Lens = 20-100x
• Medium Magnification Lens = 100-500x
• High Magnification Lens = 500-2500x
• Highest Magnification Lens = 2500-6000x

Resources

SOPs & Troubleshooting

• coming soon

Manufacturer Manuals

• coming soon

Related Instrumentation in the KNI

Optical Characterization

• Fluorescence Microscope: Olympus IX81
• Light Microscope: Olympus BX51M with Filmetrics Spectroscopic Reflectometer
• Spectroscopic Ellipsometer: Woolam M-2000